Stichwort "RTA system" in "Online Editor":
RTA system in Compact Rapid Annealing Systems - Dr. Eberl MBE-Komponenten GmbH
The Compact Rapid Thermal Annealing System AO 600 is a complete, free standing table top annealing system with small footprint
The Compact Rapid Thermal Annealing System AO 600 is a complete, free standing table top annealing system with small footprint