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Soft-acting linear motion mechanism
Shutter action time 0.2 sec (open-close)
Magnetically coupled feedthrough
Feedthrough on DN40 CF flange
30 to 100 mm linear travel
Feedthrough UHV compatible and bakeable up to 300°C
The Soft-acting Linear Shutter Module - LSM - consists of a soft-acting linear motion mechanism, driven by an electric motor and acting upon a magnetically coupled linear motion feedthrough. |
Drive module removed from feedthrough |
Automated shutter action is obtained with the LSM connected to our shutter control unit SCU. The shutter control unit provides the power to the motor (24V DC) and controls the shutter action. Position feedback indicators show the actual shutter status. The SCU allows manual and remote shutter control. The linear travel length is factory-preset on the drive unit. It can range from 30 mm up to 100 mm. |
Linear motion mechanism of the LSM |
The LSM is ideally suited for use with linear motion shutters, e.g. for our electron beam evaporator EBV. We recommend using the LSM 40 in combination with our shutter control unit SCU.
The standard shutter speed is 0.2 s (open - close). For special applications we provide slower versions with shutter speeds of about 0.5 s or 1 s between the end positions. This is often desired when heavy shutter assemblies, such as shutter plates lined with crystalline silicon plates, are moved. The slower speed further reduces the chance of particle generation.
Schematic drawing of the Soft-acting Linear Shutter |