Fully UHV compatible E-Beam Evaporator for high purity material evaporation in MBE. Single and multi-pocket models with or without in-situ flux control are available.
Octoplus 500 III-V MBE system for high quality GaAs / AlGaAs / InGaAs layer growth
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Octoplus 500 Thin Film CIGS, CZTS or CdTe solar cell MBE system. This UHV deposition system allows for the fabrication of solar cell adsorber layers with record efficiency. Substrate sizes up to 6“ or 100 x 100 mm2 are possible.
Dual MBE system with a central substrate handling module.This works perfectly with a combination of complementary materials, e.g., SiGe MBE and III-V MBE layer growth. Substrate sizes of 4“ or up to 6“ or 7x 2“ are attainable.
PEZ-series: These thermal evaporation sources are employed in the industrial production of thin film solar cells. As well as the large capacity point sources we also offer customized linear evaporation sources.
Dual MBE system with central substrate handling module. It allows the combination of complementary materials, e.g., SiGe MBE and III-V MBE layer growth. Substrate sizes of 4“ or up to 6“ or 7x 2“ are available.
Octoplus-O 400 - MBE System for deposition of high quality oxide layers using Ozone
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Atomic Carbon Sublimation Source SUKO-A |
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Forthcoming conferences with participation of Dr. Eberl MBE-Komponenten will be listed here. |