OCTOPLUS 600 MBE system for the growth of high quality III-V, II/VI or other material heterostructures on multi wafer 3x3 inch, or single wafer 6 inch substrate.
OCTOPLUS 500 III-V MBE system for high quality GaAs / AlGaAs / InGaAs layer growth
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Dual MBE system with central substrate handling module. It allows the combination of complementary materials, e.g., SiGe MBE and III-V MBE layer growth. Substrate sizes of 4“ or up to 6“ or 7x 2“ are available.
OCTOPLUS-O 400 - MBE System for deposition of high quality oxide layers using Ozone
Fully UHV compatible E-Beam Evaporator for high purity material evaporation in MBE. Single and multi-pocket models with or without in-situ flux control are available.
The OCTOPLUS 300 system is ideally suited for material deposition on small samples. It provides good access and easy operation and maintenance.