Dr. Eberl MBE-Komponenten GmbH manufactures and sells thin film deposition equipment for MBE, surface science and other UHV applications.
This page explains common terms in surface physics and crystal epitaxy
2D supracrystals The supracrystals are defined as the supra atomic periodic structure where atoms in the nodes of a structure are represented by their symmetric complexes.
2DEG Two dimensional electron gas, typically realised in GaAs / AlGaAs heterostructures or Si/SiO2
AFM Atomic force microscopy
ALD Atomic layer deposition
AlN Aluminium nitride compound
Annealing Oven Oven for, e.g., Rapid Thermal Annealing (RTA) or Rapid Thermal Processing (RTA) processes, ohmic contact formation or diffusion processes. Anneals are usually short in duration whereupon the wafer temperature is accurately measured and controlled. Our Rapid Thermal Annealing systems AO 500 /AO 600 are equipped for sample sizes up to 12 mm x 12 mm and a maximum temperature of 500°C / 600°C.
