This website presents Dr. Eberl MBE-Komponenten GmbH's wide range of standard and non-standard MBE components and related instrumentation. Each page works out the relevant details of the product's specific data and ordering information and gives an explanation of the respective product identification code.
Our specialists are however on hand to advise and assist you to make the best choice amongst the many possibilities available. It is very useful during this process to specify as many parameters as possible, and the following checklists are designed to help you collate the necessary information for requesting a quotation or for an order.
We can build replacement sources for most MBE systems. To provide a fully compatible evaporation source for your system, please specify the model number and manufacturer of the source and/or the system. In case you do not have the original data please supply us with the outer dimensions. The following checklist may be helpful:
source identification code (e.g. WEZ 40-10-22-KS-HL) - from MBE-Komponenten GmbH
source model number (e.g. Riber BN135L, EPI-5-D-C) - from other suppliers
system type (e.g. Varian GEN II, Riber P32, VG V80, Omicron MULTIPROBE MBE)
source dimensions (flange size, in-vacuum diameter, in-vacuum length, crucible type)
If necessary we can provide our sources with modified geometrical parameters whilst special source lengths are normally available free of charge. For information or a quotation please do not hesitate to ask, specifying where possible the following:
sketch of the chamber
port dimensions (flange size, inside port tube diameter, inside diameter of cooling shrouds)
Note: older MBE systems may have ports with a reduced tube I.D.
substrate information (focal point and angle and/or substrate distance, substrate size, substrate type)
cooling information (e.g. water or LN2 cooling shroud)
application (see the following section)
Our material/source selection table with the vapor pressure data of elements and compounds may help you find the suitable evaporation source for your application. In combination with some information about the geometry of your vacuum system we are able to offer to you the sources suitable for your needs. We recommend considering:
evaporation material (see the selection table)
doping or growth application (doping levels, growth rates, flux rates, operation temperatures)
substrate size and source-to-substrate distance (for estimation of homogeneity)
We offer a wide variety of special sources and solutions. The flexibility to offer custom-made and modified standard sources using new and innovative designs is a particular strength of our company. Key words are:
cluster sources (two or more individual sources on a single flange)
limited space / cells without flange / special chamber geometry
special environmental factors (e.g. high oxygen partial pressure, vacuum pressure > 10-4 mbar)
We provide several design options of our standard products. Please see the data tables at the end of each product page. Power supplies and other electronic equipment are available for all source types. Before ordering please check your need for accessories such as:
integrated or separate cooling shrouds
power supply and/or temperature controller, cable sets
additional electronic devices (e.g. shutter control unit)
Please refer to the Flange & Gasket Dimensions page for a detailed description of our flanges. To make sure our cells fit your port please note that some UHV systems have ports with reduced tube dimensions. Also the inside port diameter depends on the stainless steel tube used with the flange, especially in case of DN40 (O.D. 2.75") and DN63 (O.D. 4.5") CF flanges. If you are not sure, it is useful to measure the inside tube diameter of your port. In some cases welding seams between flange and chamber tube or reduced inside diameters of cooling shrouds make the real inside diameter of your port smaller than it seems!
In addition to the complete product name, our components have a code for the product type, e.g. VACS for "valved arsenic cracker source". The identification codes for the main product features should be added to this type code, typically beginning with the cell's mounting flange size and ending with optional product features.
The general product identification code is built up as follows: Product type - complete identification code:
type flange - feature1# - feature2# - options#
# -codes are omitted if not required
Spare parts for our products have 8-digit part numbers for identification. For example a "Filament Set SUSI 40" is part #160-00-602.