Applicable in most UHV systems
Evaporation of metals, compounds and organic materials between 80°C and 1000°C
Crucible capacities from 2 to 200 cm³
Robust, reliable tantalum wire heating system
Excellent temperature stability and controllability
- Optional on-flange integrated cooling shroud and shutter
Introduction
The Low Temperatur Effusion Cell NTEZ is designed for evaporation of materials with high vapor pressure, requiring an extremely good temperature regulation and reproducibility, e.g. alkali metals or organic materials. NTEZ cells can be used in the operating temperature range 80-1000°C.
To achieve best temperature stability and controllability the complete
heater, thermocouple and shielding construction of the NTEZ is
optimized for low temperature operation.
In contrast, standard effusion cells, e.g.
WEZ , are provided with an extensive heat
shielding for operation at elevated temperatures. This shielding however
hampers the heat radiation, which makes it difficult to regulate such
cells at lower temperatures.
Similar to standard effusion cells, the crucible is heated by a tantalum
wire filament supported by PBN rings. This wire heater concept provides
for excellent temperature uniformity within the crucible, an effective
heating even at the crucible lip, and allows the use of differently
shaped crucibles.
Standard filament SF , hot lip filament
HL and dual filament
DF heaters are available, meeting the differing
requirements of the evaporation materials and applications.
Standard crucible materials are PBN (pyrolytic boron nitride) for metals and compounds, and quartz for organic materials. Other crucible materials are available upon request.
Application
The low temperature effusion cell NTEZ is recommended for materials with high vapor pressure, e.g. organic materials, As, Sb, Ba, Bi, K, Li, Mg, Ca, CdSe, etc., which are all evaporated or sublimated at temperatures below 1000°C.
The NTEZ is used for sample preparation, thin film growth and MBE applications. The very compact model NTEZ 40-10-22-KS, for example, is particularly suited to material deposition on small samples in surface analysis systems.
For MBE applications we offer sources tailored to the different evaporation material requirements. NTEZ cells can be used both for growth and doping applications.
Please refer to DEZ Doping Effusion Cells for cells that are explicitly optimized and specialized for doping application.
Technical Characteristics
| Filament | Ta wire heating filament: standard (SF), hot lip (HL), dual (DF) |
| Thermocouple, Temperature sensor (other types on request) | Type K |
| Operating temperature | 80-1000°C (specify expected temperature range when ordering) |
| Outgassing temperature | max. 1100°C, depending on cell design (max. 800°C with quartz crucible) |
| Bakeout temperature | 250°C |
| Cooling / water cooling | integrated water cooling or separate cooling shroud |
| Crucibles | 2-200 cm³; PBN, quartz, Al2O3 crucibles (other materials on request) |
| Options | integrated water cooling (K), integrated rotary shutter (S) |
Technical Data
For general information on CF mounting flanges see Flange, Gasket and Tube Dimensions .| Product | Flange [CF] | Nominal capacity [cm³] | Lip diameter [mm] | Cooling | Shutter | Filament type | Thermocouple type | UHV dimensions [mm] specify L with order | |
|---|---|---|---|---|---|---|---|---|---|
| NTEZ | 16 | 2 | 16 | SF | K | LxxxD16 | |||
| NTEZ | 40 | 2 | 16 | SF | K | LxxxD16 | |||
| NTEZ | 40 | 2 | 16 | S | SF | K | LxxxD34 | ||
| NTEZ | 40 | 2 | 16 | K | S | SF | K | LxxxD34 | |
| NTEZ | 40 | 10 | 22 | S | SF, HL, DF | K | LxxxD34 | ||
| NTEZ | 40 | 10 | 22 | K | S | SF, HL, DF | K | LxxxD36 | |
| NTEZ | 40 | 25 | 33 | S | SF, HL, DF | K | LxxxD33 | ||
| NTEZ | 40 | 35 | 34 | S | SF, HL, DF | K | LxxxD34 | ||
| NTEZ | 40 | 12 | 37 | SF, HL, DF | K | LxxxD37 | |||
| NTEZ | 40 | 35 | 37 | SF, HL, DF | K | LxxxD37 | |||
| NTEZ | 40 | 60 | 37 | SF, HL, DF | K | LxxxD37 | |||
| NTEZ | 63 | 35 | 34 | K | S | SF, HL, DF | K | LxxxD57 | |
| NTEZ | 63 | 35 | 37 | S | SF, HL, DF | K | LxxxD56 | ||
| NTEZ | 63 | 60 | 37 | S | SF, HL, DF | K | LxxxD56 | ||
| NTEZ | 63 | 60 | 37 | K | S | SF, HL, DF | K | LxxxD57 | |
Example: NTEZ 63-60-37-KS-DF-K-P-L270D58 is a low temperature effusion cell on DN63 CF-flange for a 60cm³ crucible (lip Ø 37mm), integrated water cooling shroud, shutter, dual filament, type K thermocouple, PBN crucible, in-vacuum length 270mm and diameter 58mm.
