- RF power and frequency control for the Flexible Microplasma Source (FMP)
- Real-time monitoring of forward and reflected power
- Frequency sweep function for resonance detection
- Controlled plasma ignition procedures
- Reliable plasma ignition and stable operation
- Continuous monitoring of process parameters
- User-friendly interface allows operators to quickly set up and optimize plasma conditions for specific applications
- Flexible Integration into laboratory Systems
- Intuitive touchscreen operation
- Compact 19" rack-mount design
Introduction
The Microwave Plasma Controller (MPC) is a high-performance RF generator and control unit designed to operate the Flexible Microplasma Source (FMP). Developed for demanding laboratory and research environments, the MPC delivers stable and precisely controlled RF power for reliable plasma generation in UHV vacuum systems.
With advanced control electronics, an intuitive touchscreen interface, and multiple integration interfaces, the MPC ensures efficient operation and reproducible plasma processes for scientific and industrial applications.
The MPC generates the required RF power to ignite and sustain plasma in the Flexible Microplasma Source (FMP) mounted on a UHV vacuum chamber. Integrated monitoring and control systems allow continuous observation and adjustment of critical process parameters.
The controller features a modern touchscreen interface with graphical user interface (GUI) that enables fast and intuitive configuration of all system parameters.
The MPC is designed for seamless integration into complex laboratory and vacuum setups. All system interfaces are conveniently located on the rear panel, allowing straightforward installation and connection to external components.
Available interfaces include
- RJ45 customer/service interface
- Thermocouple (TC) interface
- 2 × Mass Flow Controller (MFC) interfaces
- USB service interface
- Valve interface
- Photodetector interface
Technical Data
| Frequency Range: | 2400 – 2500 MHz |
| Operation Mode: | CW und Pulsed Mode |
| User Interface: | Touchscreen with graphical user interface (GUI) |
| Mains input | 230 V AC / 50 Hz |
| Fuse: | < 250 V / 6 A (slow blow) |
| Maximum power: | 250W |
Technical specifications are subject to change without notice.
