Glossary
2D supracrystals The supracrystals are defined as the supra atomic periodic structure where atoms in...
2DEGtwo dimensional electron gas, typically realised in GaAs / AlGaAs heterostructures or...
AFMatomic force microscopy
ALDAtomic layer deposition
AlNAluminium nitride compound
Annealing Oven Oven for, e.g., Rapid Thermal Annealing (RTA) or Rapid Thermal Processing (RTA)...
AntimonidesComponund semiconducurs which substantially contain phosphorus
ArsenidesComponund semiconducurs which substantially contain arsenic
Bake-out UHV chambers are baked out at about 200C for several days to remove weakly bound...
Beam Flux MonitorA BA ion gauge which can be brought close to the substrate position in an MBE system....
BEPThe Beam Equivalent Pressure BEP is a local pressure of a directional gas beam on a...
Borophene Borophene is a proposed crystalline allotrope of boron. One unit consists of 36 atoms...
Carbon nanotubesCarbon nanotubes cylindrical nanostructure. Nanotubes have been constructed with...
CBEChemical beam epitaxy. MBE with gas sources instead of solid sources like effusion cells.
CF flangeCF (ConFlat) flanges use a copper gasket and a knife-edge flange to achieve an...
CIGSCopper indium gallium di-selenide (CIGS) is a semiconductor material composed of...
CISThe material is a solid solution of copper indium selenide (CIS), see also CIGS.
Cold Lip Filament CL A cold lip filament CL is a shorter version of the standard filament SF. It does...
Contact alloyingOur Rapid Annealing Systems AO 500 / AO 600 are practical for fabrication of...
Critical ThicknessImportant figure in strained layer epitaxy. A strained SiGe alloy grown on Si grows...
CryopumpA cryopump (cryogenic pump) is a vacuum pump that traps gases and vapours by condensing...
CrystallitesCrystallites are small, micrometer or nanometer size crystals, often held together...
CZTSCopper zinc tin sulfide (CZTS) is a quaternary semiconducting compound with kesterite...
DBRDistributed Bragg Reflector
Diaphragm pumpA diaphragm pump (or Membrane pump) is a positive displacement pump that uses a...
Dilute nitridesGaAsN, InGaAsN componds with only a small percentage of nitrogen incorporated on...
DopingIntentionally introduction of impurities into a high pure (intrinsic) semiconductor for...
Droplet epitaxyMechanism for the growth of one-dimensional structures, such as nanowires, from vapor...
Dual Filament DF A dual filament is composed of two heaters that can be independently operated by two...
E-beam evaporatorEvaporator in which a source material target (anode) is bombarded with an electron...
Effusion cellsee also "Knudsen cell" In contrast to a Knudsen cell which has uniform vapor...
Epitaxial layerCrystalline film deposited by MBE or CVD on a crystalline substrate wafer.
Facet passivationHigh power GaAs/AlGaAs/InGaAs laser diodes need a passivation layer on the cleaved...
FETField Effect Transistor
Filament Types Depending on specific applications and differing requirements of the evaporants...
FullerenesA fullerene is any molecule composed entirely of carbon, in the form of a hollow...
Germanane Germanane is a single-layer crystal composed of germanium with one hydrogen bonded in...
Graphane Graphane is a polymer of carbon and hydrogen with the formula unit (CH)n where n is...
GrapheneGraphene is a substance made of carbon, with atoms arranged in a regular hexagonal...
Graphyne Graphyne is another 2-dimensional carbon allotrope whose structure is similar to...
Growth modelTheoretical models of crystal surfaces provide insights into the crystal growth...
GSMBEGas Source Molecular Beam Epitaxy
HBTHetero-Bipolar Transistor
HEMTHigh Electron Mobility Transistor
HeterojunctionA heterojunction or heterostructure is the interface that occurs between two layers or...
Hot Lip Filament HL A hot lip filament HL is wired more densely at the upper part than the standard...
II-IV semiconductorsemiconductor material which contains elements out of group II and VI, as for example ZnSe
III-V semiconductorsemiconductor material which contains elements out of group III and V, as for example...
InterfaceInterface that occurs between two layers or regions of dissimilar crystalline...
Ion getter pumpAn ion getter pump is a ultra-high vacuum pump capable of reaching pressures as low as...
KesteridesKesterites are sulfide crystals with a formula Cu2(Zn,Fe)SnS4. In its lattice...
KF flangeKlein Flange (KF) flanges are made with a chamferred back surface that attached with a...
Knudsen CellThe original Knudsen type evaporation source is an evaporation cell with small orifice....
Laser diodesA laser diode is a laser whose active medium is formed by a p-n junction of a...
LEEDLow Energy Electron Diffraction
MBEMBE (molecular beam epitaxy) is a method of depositing layers of materials with atomic...
Micro-cavityAn optical microcavity is a structure formed by reflecting faces on the two sides of a...
Misfit DislocationMisfit dislocations are basically where there is a missing or dangling bond in the...
MOCVDMetal organic chemical vapor deposition
Modulation dopingsemiconductor heterostructure where doping layer is separated from the charged carriers
Molybdenum disulfide Molybdenum disulfide is the inorganic compound (MoS 2 ). Molybdenum disulfide is...
MOMBEMetal Organic Molecular Beam Epitaxy
MOVPEMetal Organic Vapor Phase Epitaxy
NanostructureA nanostructure is an crystal or material with a size in the nanometer scale.
NanowireA nanowire can be defined as structure that has a thickness or diameter constrained to...
NitridesGaInAlN compound semiconductors and heterostructures used for LEDs, laser diodes or...
NucleationAdsorption of atoms in MBE on a substrate surface, and subsequent growth of a...
OLEDOrganic Light Emitting Diode
Outgassing(sometimes also called degassing)
Initial thermal outgassing of UHV components like...
PBNPyrolytic Boron Nitride. In the form of pyrolytic BN it is used for crucibles in MBE.
Penning gaugecold-cathode ionization gauge. A DC potential of about 4 kV is used for operation....
Phosphorene Phosphorene is a 2-dimensional, crystalline allotrope of phosphorus. Its mono-atomic...
Phosphoros compoundsCompound semiconductors which substantially contain phosphoros, like InP, GaP or GaInP.
PhotodiodesA photodiode is capable of converting light into either current or voltage.
Pirani gaugeA Pirani gauge consist of a metal wire in the pressure being measured. The wire is...
Point Source A point source is an evaporation source or effusion cell which has a single localized...
Product CodeOur product code gives information about the product configuration itself. Example for...
Pseudo-morphic growthPlanar epitaxial layer growth in straind layer epitaxy. In the pseudo-morphic growth...
PVDPhysical Vapor Deposition
Quantum cascade laserUnlike normal interband semiconductor lasers, QCLs are unipolar and laser emission is...
Quantum computerA quantum computer makes use of quantum mechanical phenomena, such as superposition and...
Quantum dotQuantum dots are nanometer scale semiconductors structures whose carriers are confined...
Quantum wellA quantum well is a potential well in one crytalographic direction with only discrete...
RDSReflectance Difference Spectroscopy. It is a spectroscopic technique which measures...
RHEEDReflection high energy electron diffraction. RHEED is used in MBE systems to check...
RHEED oscillationsIntensity oscillations observed during layer by layer growth in MBE. RHEED oscillations...
Roughing pumpVacuum pump used to initially evacuate a vacuum system, as a first stage towards...
sccmsccm is an abbreviation of standard cubic centimeters per minute indicating...
Scroll pumpA scroll compressor uses two interleaving scrolls (spirals) to pump, compress liquids...
Silicene Silicene is a two-dimensional allotrope of silicon, with a hexagonal honeycomb...
Solar cellA solar cell is an electronic device that converts the energy of light directly into...
SpintronicsSpintronics (spin transport electronics), also known as magnetoelectronics, is an...
SputteringSputtering is a process where atoms are ejected from a solid target (source material)...
Standard Filament SF A standard wire filament SF heats the crucible evenly along its entire length. A...
Stanene Stanene is a 2 dimensional material. It is composed of tin (Sn) atoms arranged in a...
STMScanning Tunneling Microscopy
Strain layer epitaxyEpitaxial deposition of strained heterostructures. For example SiGe deposited on Si...
SUMO sourceThermal effusion source from Veeco Inc. for Group III evaporation in MBE with a...
SuperlatticePeriodic structure of alternating layers of two or more semiconductor materials....
Surface reconstructionSurface reconstruction refers to the process by which atoms at the surface of a crystal...
TEMTransmission Electron Microscopy
Tip Filament TFA tip filament TF practically is the upper filament of a dual filament. Only the...
Topological Insulator Material that behaves as an insulator in its interior but whose surface contains...
TSPTitanium Sublimation Pump
Tungsten diselenide Tungsten diselenide is an inorganic compound (WSe2).
It has a hexagonal crystalline...
Turbo-molecular pumpThese pumps work on the principle that gas molecules can be given momentum in a desired...
UHVA vacuum regime of a pressure lower than 10 -9 mbar characterizes Ultra High Vacuum (UHV)
Valved cracker sourceAn evaporation source which comprising a reservoire, a valve for flux control and a...
VCSELVertical Cavity Surface Emitting Laser diode