Stichwort "Manipulator Control Unit MCU" in "Online Editor":
Manipulator Control Unit MCU in Oxygen Resistant Substrate Manipulators SH-O - Dr. Eberl MBE-Komponenten GmbH
Using SiC or noble metal heaters, MBE-Komponenten offers substrate manipulators and heated stations that are resistant to oxygen or other corroding atmospheres.
Using SiC or noble metal heaters, MBE-Komponenten offers substrate manipulators and heated stations that are resistant to oxygen or other corroding atmospheres.