OCTOPLUS 800

MBE system for up to 8 inch substrate with up to 12 ports for effusion cells
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Octoplus 800

  • State-of-the-art MBE system for semiconductor device production
  • Applications: III/V, II/VI or other material heterostructures
  • 12 large source ports
  • Substrate sizes 8", 6" or 4x3" or 7x2” wafers, with face-down geometry
  • Fully automated wafer transfer
  • Extensive in-situ characterization capability
  • Professional support by PhD MBE experts

General Information

Octoplus 800
UFO chamber with fully automated wafer transfer by central handling arm.

The OCTOPLUS 800 allows the MBE growth on multi wafer 3 inch or single wafer 6 inch or 8 inch substrates. It exhibits 12 large source ports for high capacity effusion cells, valved crackers and other sources. Depending on the application, the substrate manipulator applies to Graphite, SiC, free standing tungsten or tantalum heaters with PBN diffusor plate. The OCTOPLUS 800 MBE system offers highly reproducible sample quality, it is field-proven and ideally suited for III/V, II/VI and other compound semiconductor layer growth for applications in production of semiconductor devices.

Octoplus insight
Octoplus insight

Octoplus insight2
Octoplus insight

The OCTOPLUS 800 is in use in leading research institutes and industrial laboratories. On demand we provide a list of references. Please contact our sales department for further information.

Technical Data

Size of deposition chamber
800 mm I.D.
Base pressure
< 5x10-11 mbar
PumpingTSP, ion getter pump, cryopump and/or turbopump
Cooling ShroudLN2 or other cooling liquid on request
Substrate heater temperatureup to 800°C, or up to 1000°C
Substate sizeup to 8´´ or multi-wafer substrates
Bakeout temperatureup to 200°C
Source ports12 ports DN125CF / DN150CF
Source types
effusion cells, e-beam evaporators, sublimation sources, valved cracker sources, gas sources
Shutters
soft-acting linear shutters
In-situ monitoringion gauge, QCM, pyrometer, RHEED, QMA, temperature control by kSA or Laytec, wafer curvature etc.
Sample transferfully automatic in face-down geometry
Load lockmagazine with 10 substrates, with rapid pump down
MBE control softwareTiny Tusker
Servicesystem installation and acceptance testing
MBE trainingby MBE experts with extensive application know-how