Multichamber cluster MBE systems
- Customized modular architecture
- Direct wafer transfer between the systems in cluster architecture with automated central transfer
- Linear transfer tunnel system with manual transfer
- Wide combination of different chamber configurations
- Integration of third party system modules possible
- Professional support by PhD MBE experts
General Information
Two OCTOPLUS systems can be seamlessly interconnected to form a fully integrated growth platform. This modular architecture enables direct wafer transfer between the OCTOPLUS systems, creating a unified process environment while maintaining maximum flexibility. By linking two OCTOPLUS MBE systems, users can combine different process capabilities, chamber configurations, or material sets within a single workflow. This approach not only enhances throughput and process efficiency, but also allows for scalable system expansion as requirements evolve. The result is a highly adaptable MBE solution designed to support advanced research and production needs with optimized space utilization and operational efficiency.
The following show some typical examples for cluster system arrangement. We can also provide customized versions for your process need, such as cobinations of linear + radial transfer systems. Contact us for further information.
Examples of Multi Cluster MBE System Solutions
Multi cluster MBE System with the combination with central distribution chamber
The OCTOPLUS 600 EBV system is a highly advanced deposition platform featuring integrated electron beam evaporators, seamlessly connected via a central distribution center to an OCTOPLUS 350 or 500 system. Each system module is optimized for a specific material system. The cluster architecture allows hybrid integration of these material systems in complex process architectures. The automated sample transfer system enables the possibility to include transfer of the wafer from one to the other chamber as part of the overall recipe. In this way very complex heterostructures can be achieved.
Multi cluster MBE System with the combination with linear transfer
The linear transfer system allows to arrange multiple chambers along a transfer tunnel. The linear transfer allows to handle wafers up to 4" size. The transfer tunnel can be extended in a modular way so that the amount of chambers in the arrangement is only limited by the room size.
Trusted expertise since 1990
The product range and quality of Dr. Eberl MBE-Komponenten GmbH benefit from many years of active research experience of its team members.
We now look back on about 35 years of development and manufacture of complex systems and components for multiple tasks in the applied research and production of compound semiconductor materials. Each product is assembled and carefully tested in-house by our MBE experts.
