MBE Components, Doping Effusion Cell DEZ

DEZ

Doping Effusion Cells


WEZ 40-5-27
  • Compatible with all MBE systems

  • Conical shaped crucibles with crucible capacities 2, 5, and 12 cm³

  • Most effective Ta-wire heating system

  • Large flux distribution providing excellent homogeneities

  • High reliability and long lifetime

  • Optional: on cell flange integrated shutter

DEZ 40-5-27 Doping Effusion Cell on DN40CF (O.D.2.75") flange, with conical 5 cm³ PBN crucible



Our effusion cells WEZ and NTEZ are generally designed for elemental and compound evaporation or sublimation in the temperature range from 200°C to 1400°C.

Doping applications in MBE growth however require only low quantities of dopant material. Therefore, compact effusion cells with small crucible capacities and low flux rates, but wide angled flux distribution are needed. A typical doping flux is about 3 to 5 orders of magnitude smaller than a typical growth material flux.
The Doping Effusion Cells DEZ with conical crucibles provide low power consumption, while producing excellent doping uniformities. For example, a doping level uniformity of about 1% on a 3" substrate at a distance of 150mm is reached with crucibles having a tapering angle of 10%. DEZ cells can be used as doping source for various materials like e.g. Si, Be, Ga or In.

To facilitate the source selection by doping application we have created a special Doping Application Guide, where we compiled source recommendations for the most common doping applications.

Beside the standard crucible material PBN (pyrolytic boron nitride), other crucible materials such as Al2O3 or PG (pyrolytic graphite) are also available. The crucible is heated by a tantalum wire filament supported by PBN rings. This wire heater concept provides excellent temperature uniformity within the crucible and effective heating even at the crucible lip, and allows the use of different shaped crucibles. Due to the reduced touch between the filament wires and the PBN supporting rings minimum decomposition of PBN at operation temperature is achieved. Other advantages are excellent reliability, long-term stability and an extended lifetime, compared with Ta-foil heaters.

Application

The Doping Effusion Cells DEZ are recommended for elements and compounds evaporated or sublimated at temperatures in the range 200-1400°C, e.g. Ga, In, Al, Si, Be, Cu, Ag etc.

Effusion cells with conical shaped crucibles are specially optimized for doping applications.
If two (or more) dopant materials shall be evaporated, DDS dual dopant cluster sources can be used.

Three different crucible sizes are available. Dimensions of these crucibles are shown in the figures on the right.

PBN C2-22
part no. 415-00-040 PBN 2 cm³ crucible


PBN C5-27
part no. 415-00-020 PBN 5 cm³ crucible


PBN C12-36
part no. 415-00-057 PBN 12 cm³ crucible

Technical Data

Filament type standard Ta wire filament (SF)
Thermocouple W5%Re/W26%Re (type C)
Operating temperature 200-1400°C
Outgassing temperature 1500°C
Bakeout temperature 250°C
Cooling separate cooling shroud
Crucibles 2, 5, or 12 cm³;  PBN, PG crucibles, other materials on request
Options integrated shutter (S)



Dimensions

Schematic drawing EZ Schematic drawing of the Doping Effusion Cell DEZ

(drawing shows
DEZ 40-2-22-S)



Specific data

For general information on CF mounting flanges see Flange and Gasket dimensions.

[cm³] [mm] Type Type [mm] / [mm] [W] / [A] Product code Product code
DEZ 40 - 2 - 22 - S* - SF¹ - C - P - LxxxD34 200 / 10 PS 30-10-C PBN C2-22
DEZ 40 - 5 - 27 - S* - SF¹ - C - P - LxxxD36 250 / 10 PS 30-10-C PBN C5-27
DEZ 40 - 12 - 36 - S* - SF¹ - C - P - LxxxD36 350 / 11 PS 35-20-C PBN C12-36
* rotary shutter possible on same flange      ¹ alternatively CL, HL or DF
** PBN standard, other materials on request
*** specify UHV length L with order

Product code:

e.g. DEZ 40-5-27-S-SF-C-P-L277D36

is a standard doping effusion cell on DN40 CF flange with 5cm³ conical PBN crucible, shutter, standard filament, type C thermocouple and UHV-length 277mm.