Linear multihearth UHV e-beam evaporator
full UHV integrity by hermetic all-metal sealed design, low outgassing
Bakeout temperature 200°C
Evaporation origin aligned on flange centre
Reliable manual linear translation, optional motorized translation with optical positioning
Hearth volumes 8 cm³ (x4 or x6); 15cm³ (x3 or x6)
Long filament life with 270° beam deflection
High frequency beam deflection system
MBE-Komponenten GmbH is pleased to offer you a new range of multihearth electron beam evaporators for use in ultra-high vacuum (UHV) applications: EBVM 200/250-4x8, -6x8, -3x15 and -6x15, optional with integrated source shutter. |
![]() Movable multi-pocket OFHC Cu-slide, capacity 4x8 cm³ (3x15 cm³ also available) ![]() EBVM 200-4x8-S, multi-pocket evaporator mounted on guide rod system and equipped with magnetically coupled linear shutter |
Technical data |
|
Mounting Flange |
DN200CF (O.D. 10") / DN250CF (O.D. 12") |
in-vacuum Diameter |
195 mm / 245 mm |
in-vacuum Length |
for 4x8 cm3 and 3x15 cm3: 250 mm / for 6x8 cm3: 330 mm / for 6x15 cm3: 350 mm |
Crucible capacities |
8 cm³ or 15 cm³ |
Hearth dimensions (Ø x depth) |
Ø30 mm (15° taper) x 15 mm or Ø37,8 mm (15° taper) x 17 mm |
Filament type |
short-legged coil of thick W wire, electron emitting filament |
Bakeout temperature |
200°C (all air side connectors removed) |
Operating pressure |
5 × 10-11 mbar ….1 × 10-5 mbar |
Acceleration voltage | 4 - 10 kV |
Beam power | max. 6 kW, (or 3 kW; depending on power supply) |
Filament current | max. 50 A at 10 V (AC) |
Spot size | 5 mm diameter, approx |
Primary beam deflection | 270° by permanent magnet system |
Dynamic beam deflection | coils wound from KAPTONTM - isolated wire; x-deflection current: ± 3 A; y-deflection current: ± 3 A; deflection frequency: max. 150 Hz |
Cooling | water cooling, connectors SwagelokTM Ø6 mm and Ø8 mm (air side); water flow rate 6 l/min at 3 bar |
Options | integrated source shutter (S) with manual push-pull action or with soft-acting drive unit LSM 40-100 water cooling roof motorized pocket indexing drive |
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Schematic drawing of the Multi-pocket Linear E-beam Evaporator EBVM (drawing shows the EBVM 200-4x8-S) |
For general information on CF mounting flanges see Flange and Gasket dimensions.
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[cm³] | [mm] / [mm] | [mm] | [kW] / [mA] | Product code | |||||
EBVM | 200 - | 4x8 - | K** | S** | LxxxD195 | L+160 | 6 / 600 | HV | |
EBVM | 200 - | 6x8 - | K** | S** | LxxxD195 | L+250 | 6 / 600 | HV | |
EBVM | 200 - | 3x15 - | K** | S** | LxxxD195 | L+160 | 6 / 600 | HV | |
EBVM | 200 - | 6x15 - | K** | S** | LxxxD195 | L+290 | 6 / 600 | HV | |
EBVM | 250 - | 4x8 - | K | S | LxxxD240 | L+160 | 6 / 600 | HV | |
EBVM | 250 - | 6x8 - | K | S | LxxxD240 | L+250 | 6 / 600 | HV | |
EBVM | 250 - | 3x15 - | K | S | LxxxD240 | L+160 | 6 / 600 | HV | |
EBVM |
250 - | 6x15 - | K | S | LxxxD240 | L+290 | 6 / 600 | HV |
* | manual or automated shutter actuation (with LSM 40-100) |
** | only one option at a time, either K or S |
*** | specify UHV length L with order |