MBE Components, Multi-Pocket Evaporator EBVM

EBVM

Multi-Pocket Evaporator

EBVM 200-4x8
  • Linear multihearth UHV evaporator

  • full UHV integrity by hermetic all-metal sealed design, low outgassing

  • Bakeout temperature 200°C

  • Evaporation origin aligned on flange centre

  • Reliable manual linear translation,

    optional motorized translation with optical positioning

  • Hearth volumes 8cm³ (x4 or x6); 15cm³ (x3 or x6)

  • Long filament life with 270° beam deflection

  • High frequency beam deflection system

EBVM 200-4x8 multi-pocket linear e-beam evaporator mounted on DN200 (O.D.10") CF-flange, crucible capacity 4x8 cm³ (4-pocket).

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MBE-Komponenten GmbH is pleased to offer you a new range of multihearth electron beam evaporators for use in ultra-high vacuum (UHV) applications: EBVM 200/250-4x8, -6x8, -3x15 and -6x15, optional with integrated source shutter.


Our Multi-pocket Evaporators combine great flexibility in evaporating up to four different materials from a single source for your thin film growth requirements with a compact design based on a horizontal DN200 or DN250 CF flange. All electrical and utility feedthroughs are included on this support flange, allowing easy integration into your UHV system.
For easy installation and system maintenance we provide an optional mounting guide rod system. See the picture on the right.


On the EBVM only UHV-grade materials are used without any compromise. The electromagnetic deflection coils are manufactured from KaptonTM (polyimide) isolated wires and nickel-plated magnetic steel, the permanent magnets are of a high temperature rare earth alloy and the multihearth crucible is manufactured from high purity OFHC-copper (Oxygen-Free High-Conductivity copper).
Individual water cooling circuits of both, fixed and movable parts of the copper hearth assembly, ensure cool operation and low outgassing even at high power operation.


Optionally, the EBVM can be equipped with a linear shutter. A customized water-cooled roof can be installed on request. The standard manual pocket translation can be upgraded with a motorized pocket indexing drive with position feedback for the drive controller.


The minimum flange to pocket centre distance is 250 mm depending on crucible number and size, and can be increased to adapt to your system. We are pleased to assist you in integrating the EBVM into your existing UHV system. Don't hesitate to contact us for further information and advice for your special application.


Movable multi-pocket Cu-slide

Movable multi-pocket OFHC Cu-slide,
capacity 4x8 cm³ (3x15 cm³ also available)


Model of EBVM 200-4x8-S

EBVM 200-4x8-S, multi-pocket evaporator
mounted on guide rod system and equipped with magnetically coupled linear shutter

Technical Data

Mounting Flange
DN200 CF (O.D. 10") / DN250 CF (O.D. 12")
in-vacuum Diameter
195 mm / 245 mm
in-vacuum Length
for 4x8cc and 3x15cc: 250 mm / for 6x8cc: 330mm / for 6x15cc: 350mm
Crucible capacities
8 cm³ or 15 cm³ 
Hearth dimensions (Ø x depth)
Ø30mm (15° taper) x 15mm or Ø37,8mm (15° taper) x 17mm
Filament type
short-legged coil of thick W wire, electron emitting filament
Bakeout temperature
200°C (all air side connectors removed)
Operating pressure
5 × 10-11 mbar ….1 × 10-5 mbar
Acceleration voltage 4 - 10 kV
Beam power max. 6 kW, (or 3 kW; depending on power supply)
Filament current max. 50 A at 10 V (AC)
Spot size 5 mm diameter, approx
Primary beam deflection 270° by permanent magnet system
Dynamic beam deflection coils wound from KAPTONTM - isolated wire;
x-deflection current: ± 3 A; y-deflection current: ± 3 A;
deflection frequency: max. 150 Hz
Cooling water cooling, connectors SwagelokTM Ø6mm and Ø8mm (air side);
water flow rate 6 l/min at 3 bar
Options integrated source shutter (S) with manual push-pull action or with soft-acting drive unit LSM 40-100;
water cooling roof;
motorized pocket indexing drive


Dimensions

Schematic drawing EBVM Schematic drawing of the Multi-Pocket Linear E-beam Evaporator EBVM

(drawing shows the
EBVM 200-4x8-S)