EBVM

MBE-Komponenten GmbH is pleased to offer you a new range of multihearth electron beam evaporators for use in ultra-high vacuum (UHV) applications: EBVM 200/250-4x8, -6x8, -3x15 and -6x15, optional with integrated source shutter.


Our Multi-pocket Evaporators combine great flexibility in evaporating up to four different materials from a single source for your thin film growth requirements with a compact design based on a horizontal DN200CF or DN250CF flange. All electrical and utility feedthroughs are included on this support flange, allowing easy integration into your UHV system.
For easy installation and system maintenance we provide an optional mounting guide rod system. See the picture on the right.


On the EBVM only UHV-grade materials are used without any compromise. The electromagnetic deflection coils are manufactured from Kapton^TM (polyimide) isolated wires and nickel-plated magnetic steel, the permanent magnets are of a high temperature rare earth alloy and the multihearth crucible is manufactured from high purity OFHC-copper (Oxygen-Free High-Conductivity copper).
Individual water cooling circuits of both, fixed and movable parts of the copper hearth assembly, ensure cool operation and low outgassing even at high power operation.


Optionally, the EBVM can be equipped with a linear shutter. A customized water-cooled roof can be installed on request. The standard manual pocket translation can be upgraded with a motorized pocket indexing drive with position feedback for the drive controller.


The minimum flange to pocket centre distance is 250 mm depending on crucible number and size, and can be increased to adapt to your system. We are pleased to assist you in integrating the EBVM into your existing UHV system. Don't hesitate to contact us for further information and advice for your special application.