Fully UHV compatible
Small dimensions fit onto DN63CF (O.D. 4.5'') ports
Hearth volumes 4 cm3 or 5 cm3
High purity evaporation of metals and dielectrica
Long filament lifetime and easy maintenance
270° beam deflection
High frequency x-y-beam deflection system
Silicon shielding parts for use in SiGe-MBE
The Vertical Electron Beam Evaporators EBVV allow the user to introduce real e-beam evaporation into many growth systems originally designed for radiation heated effusion cells only. Despite its small footprint, the EBVV features a complete electromagnetic x- and y-dynamic beam deflection system and is capable of delivering beam powers up to 3kW @ 6kV. |
![]() EBVV 63-4, view onto emitter block and filament |
ApplicationThe small dimensions and the vertical evaporator design open the path to a new range of applications: |
![]() EBVV 63-5, pool of molten silicon (EBVV is mounted into a port 35° to the vertical axis) |
Silicon shielding parts for SiGe MBESiGe MBE is another key application for the EBVV. For Si growth in an MBE system the use of the EBVV 63-5 is recommended because hearth capacity and geometry are optimized for this special application. |
![]() EBVV 63-5, with shielding parts |
Technical data |
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Mounting flange |
DN63CF (O.D.4,5“) or DN100CF (O.D.6“) |
Dimensions in UHV |
L=234-400 mm; D=60 mm |
Hearth dimensions | H=15 mm; Ø=22 mm (15° taper) or Ø=23 mm (12° taper) |
Bakeout temperature | 200° |
Spot size | 5 mm diameter, approx. |
Primary beam deflection | 270° by permanent magnet system |
Water cooling | Min. water flow rate 5 l/min at 4 bar |
Options | Tilted hearth (T); integrated rotary shutter (S) |
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Schematic drawing of the Vertical Electron Beam Evaporator EBVV (drawing shows EBVV 63-5) |
For general information on CF mounting flanges see Flange and Gasket dimensions.
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[cm³] | [mm] / [mm] | [kW] / [mA] | Product code | ||||
EBVV | 63- | 4- | S**- | L250-400 / D60 | 3 / 500 | HV | |
EBVV | 63- | 5- | S**- | L250-400 / D60 | 3 / 500 | HV |
* | manual or automated shutter actuation |
** | same diameter D=60 mm with shutter |
*** | specify UHV length L with order |