Compatible with most MBE systems
Various crucible materials; crucible capacity 10 cm³
No ceramic insulation parts in hot area
Free-standing thick tungsten wire filament
Clean operation in UHV up to 2000°C
High reliability and long lifetime
Water cooled current contacts
The High Temperature Effusion Cells HTEZ are designed for clean UHV operation up to 1900°C. This is accomplished by a self-supporting tungsten filament.
Main parts of the HTEZ-W schematic
|Well-designed tungsten filaments have proved to be very stable, thus safeguarding a long lifetime even when working on the upper limit of the cell.
The figure on the right provides a view into the orifice of a hot HTEZ-W cell. The red-hot filament is clearly visible.
The HTEZ-W design allows mounting ceramic crucibles (e.g. BeO) directly into the cell without outer metal crucible. In this way a higher temperature of the evaporation material in the crucible can be achieved.
The HTEZ-W is designed for evaporation or sublimation of low vapor pressure elements and compounds at temperatures up to 2000°C, e.g. for materials like Fe, Cr, Ni, Co, V, Pt, Ti, La etc. Typical applications are surface science analysis or thin film deposition of magnetic or oxide layers.
The maximum operating temperature of the HTEZ-W may be limited by the crucible choice, e.g. to 1600°C with PBN. Furthermore, possible reactions of evaporants with the crucible material should be taken into account, which may also reduce the maximum advisable temperature.
Please refer to the Selection Guide for material data and decision-making advice.
|Filament type||free-standing tungsten filament|
|Thermocouple||W5%Re/W26%Re (type C)|
|Operating temperature||max. 2000°C, depending on crucible material|
|Outgassing temperature||max. 2000°C, depending on crucible material|
|Cooling||integrated water cooling|
|Crucibles||10 cm³; Al2O3, BeO, Ta, W crucibles (other materials on request)|
Standard crucible sizes is 10 cm³. Different crucible materials such as Al2O3, BeO, Ta, W, pyrolytic graphite (PG) and pyrolytic boron nitride (PBN) can be applied. For detailed information on crucibles see Crucibles.
Different ceramic and metal 10 cm³ crucibles for HTEZ-W
|Schematic drawing of the High Temperature Effusion Cell HTEZ-W
For general information on CF mounting flanges see Flange and Gasket dimensions.
|[cm³]||[mm]||[mm] / [mm]||[W] / [A]||Product code||Product code|
|HTEZ-W||40 -||10 -||32 -||T -||LxxxD36||920 / 34||PS 40-38||Ta 10-32|
|**||no standard, please inquire for your particular solution|
|***||specify UHV length L with order|
e.g. HTEZ-W 40-10-32-T-L250D36
is a high temperature effusion cell on DN40CF-flange with 10 cm³ crucible (lip Ø 32 mm), Tantalum crucible, in-vacuum length 250 mm and diameter 36 mm.