Compatible with most MBE systems
Various crucible sizes and materials;
crucible capacities 1.5, 10, and 35 cm³
Self-supporting tungsten wire heater
Clean operation in UHV up to 1900°C
High reliability and long lifetime
Cell option with integrated cooling shroud and shutter
The High Temperature Effusion Cell HTEZ is designed for clean UHV operation up to 1900°C. This is accomplished by a self-supporting tungsten filament, whose schematic drawing is pictured on the right, showing the main parts of the HTEZ heating system. |
![]() Main parts of the HTEZ schematic |
The HTEZ design allows mounting ceramic crucibles (e.g. PBN, BeO, etc.) directly into the cell without an outer metal crucible. In this way a higher temperature of the evaporation material in the crucible can be achieved. |
![]() HTEZ 40-1-20-KS, pictured with suitable crucibles from different materials |
The HTEZ is designed for evaporation or sublimation of low vapor pressure elements and compounds at temperatures up to 1900°C, e.g. for materials like Fe, Cr, Ni, Co, Au, Ge etc. Typical applications are surface science analysis or thin film deposition of magnetic or oxide layers.
The maximum operating temperature of the HTEZ may be limited by the crucible choice, e.g. to 1600°C with PBN. Furthermore, possible reactions of evaporants with the crucible material should be taken into account, which may also reduce the maximum advisable temperature.
Please refer to the Selection Guide for material data and decision-making advice.
Technical data |
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Filament type | self-supporting tungsten filament |
Thermocouple | W5%Re/W26%Re (type C) |
Operating temperature | max. 1900°C, depending on crucible material and filament design |
Outgassing temperature | max. 1900°C, depending on crucible material |
Bakeout temperature | 250°C |
Cooling | integrated water cooling or separate cooling shroud |
Crucibles | 1.5, 10, or 35 cm³; Al2O3, BeO, Ta, W crucibles (other materials on request) |
Options | integrated water cooling (K), integrated rotary shutter (S) |
CruciblesStandard crucible sizes are 1.5, 10 and 35 cm³ (other shapes and dimensions available upon request). |
![]() Different ceramic and metal 1.5 and 10 cm³ crucibles for HTEZ |
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Schematic drawing of the High Temperature Effusion Cell HTEZ (drawing shows HTEZ 40-10-32) |
For general information on CF mounting flanges see Flange and Gasket dimensions.
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[cm³] | [mm] | [mm] / [mm] | [W] / [A] | Product code | Product code | ||||||
HTEZ | 40 - | 1 - | 20 - | S - | B - | LxxxD34 | 245 / 13 | PS 40-19 | BeO 1-20 | ||
HTEZ | 40 - | 1 - | 20 - | K | S - | B - | LxxxD36 | 245 / 13 | PS 40-19 | BeO 1-20 | |
HTEZ | 40 - | 10 - | 32 - | S - | B - | LxxxD36 | 625 / 13 | PS 80-19 | BeO 10-32 | ||
HTEZ | 63 - | 10 - | 32 - | K | S - | B - | LxxxD57 | 625 / 13 | PS 80-19 | Ta 10-32 | |
HTEZ | 63 - | 35 - | 37 - | S - | A - | LxxxD56 | 1075 / 16 | PS 80-19 | Al2O3 35-37 | ||
HTEZ | 63 - | 35 - | 54 - | S - | A - | LxxxD56 | 1075 / 16 | PS 80-19 | Al2O3 C35-54 | ||
HTEZ | 100 - | 82 - | 71 - | K | S - | P - | LxxxD95 | 1360 / 17 | PS 100-24 | PBN C82-71 |
* | rotary shutter possible on same flange |
** | no standard, inquire for your particular solution |
*** | specify UHV length L with order |
Product code:
e.g. HTEZ 40-10-32-A-L287D36
is a high temperature effusion cell on DN40 CF-flange for a 10 cm³ crucible (lip Ø 32mm), Al2O3 crucible, in-vacuum length 287mm and diameter 36mm.