Clean operation in UHV up to 2000°C
Excellent beam uniformity for doping and layer growth applications
Flat pyrolytic graphite or tungsten wire filaments
Wide opening crucibles with capacities from 5 to 200 cm³
Various crucible materials
The High Temperature Source HTS allows evaporation of high vapor pressure materials, thereby combining very uniform material deposition with high flux rates. This is accomplished by heating a shallow crucible with wide opening up to a maximum temperature of 2000°C. Typical applications are boron doping or Ge evaporation in Si MBE.
Main parts of the HTS assembly
The pyrolytic graphite parts used in a HTS source are pictured on the right. For Ge evaporation in Si MBE the HTS is usually equipped with PBN or PG crucible and an additional Si orifice plate.
Pyrolytic graphite (PG) parts of the HTS
Typical applications of the HTS/HTS-W are the sublimation of elemental boron for p-type doping in MBE or silicon solar cell research and evaporation of Ge in SiGe MBE.
Results from p-type doping in Si MBE, using the HTS for sublimation of boron, are shown in the right-hand figure.
Typical boron doping levels achieved with HTS 63-25-50
|Filament type||HTS: high purity pyrolytic graphite filament;
HTS-W: flat two-layer tungsten wire filament
|Filament shielding||HTS: filament completely shielded with PG parts;
HTS-W: filament shielded with tantalum radiation shielding
|Thermocouple||W5%Re/W26%Re (type C)|
|Operating temperature||max. 2000°C (1700°C for HTS 100)|
|Outgassing temperature||max. 2000°C (1700°C for HTS 100)|
|Cooling||integrated water cooling or separate cooling shroud|
|Crucibles||5, 25, 200 cm³; PG, W, PBN, BeO crucibles (other materials on request)|
|Options||integrated water cooling (K), integrated rotary shutter (S)|
Standard crucible sizes of the HTS are 5, 25, and 200 cm³. PG, BeO, PBN, and W are commonly used crucible materials. The maximum operating temperature may be reduced by the choice of the crucible, e.g. to1600°C for PBN.
Please refer to the Selection Guide or inquire for detailed recommendations. For information on crucibles see Crucibles.
The second number of the product code is the nominal crucible capacity [in cm³], the third number indicates the lip diameter of the crucible. Please specify the crucible material.
|Schematic drawing of the High Temperature Source HTS
(drawing shows HTS 40-5-30)
For general information on CF mounting flanges see Flange and Gasket dimensions.
|[cm³]||[mm]||[mm] / [mm]||[W] / [A]||Product code||Product code|
|HTS||40 -||5 -||30 -||G -||LxxxD36||515 / 80||PS 60-100||PG 5-30|
|HTS||63 -||25 -||50 -||S -||G -||LxxxD56||890 / 90||PS 15-100||PG 25-50|
|HTS||100 -||200 -||102 -||G -||LxxxD106||3200 / 80||PS 60-100||PG 200-102|
|HTS-W||40 -||5 -||30 -||G -||LxxxD36||470 / 20||PS 35-24||PG 5-30|
|HTS-W||63 -||5 -||30 -||K||S -||G -||LxxxD57||445 / 20||PS 35-24||PG 5-30|
|*||rotary shutter possible on same flange|
|**||no standard, inquire for your particular solution|
|***||specify UHV length L with order|
e.g. HTS 63-25-50-S-G-L300D56
a high temperature source (with graphite filament) on DN63 CF-flange for a 25cm³ crucible (lip Ø 50mm), with integrated shutter, PG crucible, in-vacuum length 300mm and diameter 56mm.