MBE Components, Low Temperature Effusion Cell NTEZ

NTEZ

Low Temperature Effusion Cell

 

NTEZ 40-10-22-S
NTEZ 40-2-16-S-SF Low Temperature Effusion Cell with rotary shutter on DN40CF (O.D. 2.75") flange, 2 cm³ crucible and standard filament

  • Applicable in most UHV systems

  • Evaporation of metals, compounds and organic materials between 80°C and 1000°C

  • Crucible capacities from 2 to 200 cm³

  • Robust, reliable tantalum wire heating system

  • Excellent temperature stability and controllability

  • Optional on-flange integrated cooling shroud and shutter

Download IconData Sheet

 

The Low Temperatur Effusion Cell NTEZ is designed for evaporation of materials with high vapor pressure, requiring an extremely good temperature regulation and reproducibility, e.g. alkali metals or organic materials. NTEZ cells can be used in the operating temperature range 80-1000°C.

To achieve best temperature stability and controllability the complete heater, thermocouple and shielding construction of the NTEZ is optimized for low temperature operation.
In contrast, standard effusion cells, e.g. WEZ, are provided with an extensive heat shielding for operation at elevated temperatures. This shielding however hampers the heat radiation, which makes it difficult to regulate such cells at lower temperatures. 

Similar to standard effusion cells, the crucible is heated by a tantalum wire filament supported by PBN rings. This wire heater concept provides for excellent temperature uniformity within the crucible, an effective heating even at the crucible lip, and allows the use of differently shaped crucibles.
Standard filament SF, hot lip filament HL and dual filament DF heaters are available, meeting the differing requirements of the evaporation materials and applications.

Standard crucible materials are PBN (pyrolytic boron nitride) for metals and compounds, and quartz for organic materials. Other crucible materials are available upon request.

 WEZ wire heater

Schematic of the wire heating assembly

Application

The low temperature effusion cell NTEZ is recommended for materials with high vapor pressure, e.g. organic materials, As, Sb, Ba, Bi, K, Li, Mg, Ca, CdSe, etc., which are all evaporated or sublimated at temperatures below 1000°C. 

The NTEZ is used for sample preparation, thin film growth and MBE applications. The very compact model NTEZ 40-10-22-KS, for example, is particularly suited to material deposition on small samples in surface analysis systems.

For MBE applications we offer sources tailored to the different evaporation material requirements. NTEZ cells can be used both for growth and doping applications.

Please refer to DEZ Doping Effusion Cells for cells that are explicitly optimized and specialized for doping application.

 NTEZ 40-10-22-KS close-up

NTEZ 40-10-22-KS-SF view onto standard filament

 

Technical data
Filament type Ta wire heating filament: standard (SF), hot lip (HL), dual (DF)
Thermocouple NiCr/NiAl (type K), (type C on request)
Operating temperature 80-1000°C (specify expected temperature range when ordering)
Outgassing temperature max. 1100°C, depending on cell design (max. 800°C with quartz crucible)
Bakeout temperature 250°C
Cooling integrated water cooling or separate cooling shroud
Crucibles 2-200 cm³; PBN, quartz, Al2O3 crucibles (other materials on request)
Options integrated water cooling shroud (K), integrated shutter (S)

 

Crucibles

In order to ensure compatibility with all MBE systems, NTEZ cells are conveniently available with a wide range of standard crucibles of different shapes and sizes. Most of the crucibles are cylindrical, but conical shapes with taper angles up to 10° are available as well.
For the majority of metals and compunds within the approved temperature range PBN is the recommended crucible material. Quartz crucibles are used for the evaporation of organics. Other crucible materials are available as required. Please refer to the Selection Guide or inquire for detailed recommendations. For information on crucibles see Crucibles.

The second number of the product code is the nominal crucible capacity [in cm³], the third number indicates the lip diameter of the crucible. Please specify crucible material, if not PBN.

 

Dimensions

Schematic drawing NTEZ Schematic drawing of the Low Temperature Effusion Cell NTEZ

(drawing shows
NTEZ 40-10-22-S)

 

Specific data

For general information on CF mounting flanges see Flange and Gasket dimensions.

[cm³] [mm] Type Type [mm] / [mm] [W] / [A] Product code Product code
NTEZ 16 - 2 - 16 - SF - K - P - LxxxD16 55 / 5 PS 15-10 PBN 2-16
NTEZ 40 - 2 - 16 - SF - K - P - LxxxD16 50 / 4 PS 15-10 PBN 2-16
NTEZ 40 - 2 - 16 - S - SF - K - P - LxxxD34 85 / 6 PS 15-10 PBN 2-16
NTEZ 40 - 2 - 16 - K S - SF - K - P - LxxxD34 80 / 6 PS 15-10 PBN 2-16
NTEZ 40 - 10 - 22 - S - SF¹ - K - P - LxxxD34 165 / 8 PS 30-10 PBN 10-22
NTEZ 40 - 10 - 22 - K S - SF¹ - K - P - LxxxD36 150 / 7 PS 30-10 PBN 10-22
NTEZ 40 - 25 - 33 - S - SF¹ - K - P - LxxxD33 210 / 10 PS 30-10 PBN 10-22
NTEZ 40 - 35 - 34 - S - SF¹ - K - P - LxxxD34 340 / 10 PS 40-19 PBN 35-34
NTEZ 40 - 12 - 37 - SF¹ - K - P - LxxxD37 200 / 11 PS 30-25 PBN C12-37
NTEZ 40 - 35 - 37 - SF¹ - K - P - LxxxD37 305 / 9 PS 40-19 PBN 35-37
NTEZ 40 - 60 - 37 - SF¹ - K - P - LxxxD37 340 / 10 PS 40-19 PBN 60-37
NTEZ 63 - 35 - 34 - K S - SF¹ - K - P - LxxxD57 310 / 10 PS 40-19 PBN 35-34
NTEZ 63 - 35 - 37 - S - SF¹ - K - P - LxxxD56 230 / 10 PS 30-10 PBN 35-37
NTEZ 63 - 60 - 37 - S - SF¹ - K - P - LxxxD56 335 / 10 PS 40-19 PBN 60-37
NTEZ 63 - 60 - 37 - K S - SF¹ - K - P - LxxxD57 335 / 10 PS 40-19 PBN 60-37

 

* rotary shutter possible on same flange      ¹ alternatively HL or DF
** PBN standard, other materials on request
*** specify UHV length L with order

 

Product code:

e.g. NTEZ 63-60-37-KS-DF-K-P-L270D58

is a low temperature effusion cell on DN63 CF-flange for a 60cm³ crucible (lip Ø 37mm), integrated water cooling shroud, shutter, dual filament, type K thermocouple, PBN crucible, in-vacuum length 270mm and diameter 58mm.