Compatible with standard MBE systems, e.g. from Varian, EPI, Veeco, VG, or Riber
Crucible capacities 40-1700 cm³
Precise run-to-run flux reproducibility
Customized beam shaping crucible inserts available
Excellent reliability and long lifetime
Hot lip, cold lip and dual filament designs
Optional integrated cooling shroud
ISO-K cells available for HV applications
Production Effusion Cells PEZ are designed to meet the particular requirements of production MBE systems with higher throughput. |
![]() Dual filament heater of PEZ 63-130-54-DF |
The standard crucible material for the PEZ is PBN. PEZ cells are either equipped with conical or cylindrical crucibles, depending on the MBE chamber design, and offer precice flux reproducibility and excellent thickness uniformity. |
![]() Rear view onto dual filament power and TC connectors of PEZ 63-60-54-DF |
The consequent use of power and TC feedthroughs on separate DN16 CF flanges allows easy servicing. |
![]() PEZ 150 Production Effusion Cell next to a cooling shroud and a mounted combination of both |
The right-hand picture shows the PEZ 150-700-124-DF, a large production effusion cell with conical 700 cm³ crucible and dual filament. This cell is typically used for evaporation of III metals simultaneous on several semiconductor samples in III-V MBE production systems. |
![]() PEZ 150-700-124-DF, production effusion cell on DN150CF (O.D. 8") flange |
ISO-K cells for HV applications are also available. The picture on the right shows two examples on 160K flanges, a PEZ 160K-500-90-(S) with 500 cm3 nominal crucible capacity and a PEZ 160K-160-98-K with 160 cm3 nominal crucible capacity. |
![]() PEZ 160K-500-90-(S) and PEZ 160K-160-98-K, production effusion cells on ISO-K flange |
Technical data |
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Filament type | Ta wire heating filament: standard (SF), hot lip (HL), cold lip (CL), dual (DF) |
Thermocouple | W5%Re/W26%Re (type C) (type K on request) |
Operating temperature | 200-1400°C (recommended 700-1300°C) |
Outgassing temperature | 1500°C |
Bakeout temperature | 250°C |
Cooling | integrated water cooling or separate cooling shroud |
Crucibles | 40-1700 cm³ (larger capacity on request); crucible material: PBN |
Options | integrated water cooling shroud (K) |
Standard crucible material for the PEZ is PBN. Other crucible materials are available upon request.
Depending on evaporation material and chamber geometry, PEZ cells can be equipped either with conical (e.g. 40 cm³, 60 cm³, 1700 cm³) or cylindrical crucibles. Unless not explicity refused, PEZ cells with cylindrical crucible are as standard delivered with an additional customized beam shaping crucible insert.
For detailed information see page Crucibles.
The second number of the product code is the nominal crucible capacity [in cm³], the third number indicates the lip diameter of the crucible. Please specify crucible material, if not PBN.
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Schematic drawing of the Production Effusion Cell PEZ (drawing shows PEZ 63-60-54) |
For general information on CF mounting flanges see Flange and Gasket dimensions.
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[cm³] | [mm] | Type | Type | [mm] / [mm] | [W] / [A] | Product code | Product code | ||||||
PEZ | 63 - | 85 - | 41 - | K - | SF¹ - | C - | P - | LxxxD62 | 565/ 11 | PS 40-19 | PBN 85-41 | ||
PEZ | 63 - | 25 - | 51 - | K - | SF¹ - | C - | P - | LxxxD62 | 555 / 17 | PS 40-19 | PBN C25-51 | ||
PEZ | 63 - | 40 - | 51 - | K - | SF¹ - | C - | P - | LxxxD62 | 555 / 17 | PS 40-19 | PBN C40-51 | ||
PEZ | 63 - | 60 - | 54 - | S- | SF¹ - | C - | P - | LxxxD55 | 775 / 15 | PS 80-19 | PBN C60-54 | ||
PEZ | 63 - | 80 - | 54 - | S- | SF¹ - | C - | P - | LxxxD55 | 835 / 16 | PS 80-19 | PBN C80-54 | ||
PEZ | 63 - | 125 - | 54 - | S- | SF¹ - | C - | P - | LxxxD55 | 1140 / 14 | PS 100-15 | PBN 125-54 | ||
PEZ | 63 - | 130 - | 54 - | S- | SF¹ - | C - | P - | LxxxD55 | 1140 / 14 | PS 80-19 | PBN 130-54 | ||
PEZ | 63 - | 200 - | 58 - | SF¹ - | C - | P - | LxxxD58 | 1360/ 16 | PS 80-19 | PBN 200-58 | |||
PEZ | 63 - | 150 - | 60 - | K - | SF¹ - | C - | P - | LxxxD62 | 1000 / 14 | PS 80-19 | PBN 150-60 | ||
PEZ | 100 - | 200 - | 84 - | K - | SF¹ - | C - | P - | LxxxD84 | 1800 / 14 | PS 120-25 | PBN C200-84 | ||
PEZ | 100 - | 420 - | 84 - | K - | SF¹ - | C - | P - | LxxxD84 | 1800 / 14 | PS 120-25 | PBN 420-84 | ||
PEZ | 150 - | 700 - | 124 - | DF - | C - | P - | LxxxD125 | 2300 / 27 | PS 100-33 | PBN C700-124 | |||
PEZ | 150 - | 1500 - | 124 - | DF - | C - | P - | LxxxD125 | 2500 / 30 | PS 100-33 | PBN 1500-124 | |||
PEZ | 200 - | 1700 - | 164 - | K - | DF - | C - | P - | LxxxD180 | 3000 / 35 | PS 120-50 | PBN C1700-164 |
* | rotary shutter possible on same flange | Note: max. Power/Current and Power supply are dependent on filament operating mode (SF, Cl, TF, HL or DF) | |
** | PBN standard, other materials on request | ¹ | alternatively CL, TF, HL or DF |
*** | specify UHV length L with order |
Larger sizes for industry applications are available, too. Please have a look at Industrial Sources.
Product code:
e.g. PEZ 63-85-41-K-CL-C-P-L326D62
is a production effusion cell on DN63 CF-flange for a 85cm³ crucible, with integrated water cooling shroud, cold lip filament, type C thermocouple, PBN crucible, in-vacuum length 326mm and diameter 62mm.