Thermal sublimation of atomic carbon
Refractory metal tube filament filled with ultrapure carbon
Water-cooled power feedthrough
Cooling shroud and shutter optionally available
The Carbon Sublimation Source SUKO-A provides pure, highly reactive atomic carbon with a vast majority of C1 instead of the large percentage of C2 and C3 clusters (~75%) that are naturally released during the sublimation of graphite.
The power feedthrough is water-cooled and process safe without any water or vacuum welding seam.
Main parts of the SUKO-A assembly
The following table shows the required electrical power and typical flux rates at 100 mm working distance of the currently available SUKO-A models.
|Source type||Mounting flange||Electrical power||Carbon flux
|SUKO-A 40||DN40CF (O.D. 2.75")||500 W||0.1 nm/min|
|SUKO-A 63||DN63CF (O.D. 4.5")||1000 W||0.5 nm/min|
||DN40CF (O.D. 2.75") or DN63CF (O.D. 4.5")|
|Dimensions in vacuum||L=250-400 mm, D=36 or D=55 mm|
|Filament type||refractory metal tube filled with carbon|
|Filament shielding||filament completely shielded with PG parts|
|Thermocouple||W5%Re/W26%Re (type C)|
|Bakeout temperature||max. 250°C|
|Operation temperature||max. filament temperature 2300°C|
|Electrical contacts||water-cooled (4x Swagelok fitting connection O.D. 6 mm); water flow min. 30 l/h|
|Cooling||separate water (or LN2) cooling shroud|
|Options||integrated rotary shutter (S)|
|Schematic drawing of the Atomic Carbon Sublimation Source SUKO-A
(drawing shows SUKO-A 40)
For general information on CF mounting flanges see Flange and Gasket dimensions.
|[mm] / [mm]||[W] / [A]||[nm/min]||Product code|
|SUKO-A||40 -||LxxxD36||500 / 75||0.1||PS 20-76|
|SUKO-A||63 -||S -||LxxxD55||1000 / 110||0.5||PS 20-120|
|*||rotary shutter possible on same flange|
|**||maximum growth rate at 100mm distance|
|***||specify UHV length L with order|
e.g. SUKO-A 63-S-L300D55
is an atomic carbon sublimation source on DN63 CF-flange with shutter, in-vacuum length 300mm and diameter 55mm.