Full PBN solution for corrosive materials like Te, Sb, Se, As, Mg
DN40CF (O.D. 2.75" ) mounting flange compatible with all MBE systems
Thermal cracking up to 1300°C
35 cm3 or 130 cm3 PBN reservoir
Excellent thermal isolation between low temperature reservoir and hot cracking zone
Integrated water cooling for cracker stage
Integrated rotary shutter
|The Thermal Cracker Cell TCC is an effusion cell equipped with a cracker stage with integrated water cooling shroud on its space-saving DN40CF (O.D. 2.75") flange. The cell features a crucible size of 35 cm3 or 130 cm3 which is sufficient for most R&D applications.
The TCC is designed for evaporation of materials at operation temperatures from 100°C to 650°C with an additional cracker stage on the end of the injector tube that provides temperatures up to 1300°C.
The crucible is heated by a tantalum wire heater. The standard crucible material suitable for most evaporants is PBN.
The shielding of the crucible is reduced to optimize the cell for low temperature operation. That way a good flux control for high vapor pressure materials is possible without using an additional valve.
The crucible and cracker zones are shrouded by water cooling therefore the thermal load on the chamber is neglectable.
TCC time-temperature diagramm for heating of the cracker only
|The aim of the TCC is to reduce the thermal crosstalk of the cracker and the reservoir.
This is realized by excellent thermal insulation between the low temperature reservoir and the hot cracking zone.
The figure on the left shows the temperature response of tube and crucible in case of heating the cracker only.
The temperature is measured by thermocouples on application critical positions: within the cracker zone, the tube and at the bottom of the crucible.
Even at cracker temperatures around maximum temperature of 1300°C the temperatures of tube and crucible stay unaffected to a large extend.
A source concept like this is used for high vapor pressure materials, which form atom clusters. Typical evaporation elements are As, Se, Sb, Te, Mg.
|Port to chamber||DN40CF (2.75” O.D.)|
|In-vacuum diameter||36 mm|
||220 mm or 287 mm|
|Shutter opening angle||90° ccw|
|Cooling water flow||30-60 l/h|
|Maximum chamber pressure||10-5 mbar|
||35 cm³ or 130 cm³|
||PBN (others on request)|
||tantalum wire filament|
|Cooling||integrated water cooling shroud|
||100°C - 650°C|
||NiCr/NiAl (type K)|
|Heater type||tantalum wire filament|
|Operating temperature||200°C - 750°C|
|Thermocouple||W5%Re/W26%Re (type C)|
||tantalum wire filament|
||integrated water cooling shroud|
|Operating temperature||300°C - 1200°C|
||W5%Re/W26%Re (type C)|
The most commonly used crucible material suitable for most evaporants is PBN; other materials are available as required. Please refer to the Selection Guide or inquire for detailed recommendations. For information on crucibles see Crucibles.
|Schematic drawing of the Thermal Cracker Cell TCC
For general information on CF mounting flanges see Flange and Gasket dimensions.
|[cm³]||[mm]||[mm] / [mm]||[W] / [A]||Product code||Product code|
|TCC||40 -||35 -||37 -||K||S-||P -||LxxxD36||130 / 8||2x PS 30-10 ¹||PBN 35-37|
|TCC||40 -||130 -||54 -||K||S-||P -||LxxxD36||130 / 8||2x PS 30-10 ¹||PBN 130-54|
|*||rotary shutter possible on same flange||¹||Power supplies for reservoir and cracker heater.
For optional pipe heater a third power supply is needed.
|**||PBN standard, other materials on request|
|***||specify UHV length L with order|
e.g. TCC 40-130-54-KS-P-L220C36
is a Thermal Cracker Cell on DN40 CF-flange for an 130 cm³ crucible (lip Ø 54 mm), with integrated water cooling shroud, shutter, PBN crucible, in-vacuum length 220 mm and outer diameter 36 mm.