MBE Components, Thermal Cracker Cell TCC


Thermal Cracker Cell


TCC 40-130-54-KS
TCC 40-130-54-KS with integrated cooling shroud and shutter on DN40CF (O.D. 2.75") flange with 130 cm³ crucible
  • Full PBN solution for corrosive materials like Te, Sb, Se, As, Mg

  • DN40CF (O.D. 2.75" ) mounting flange compatible with all MBE systems

  • Thermal cracking up to 1300°C 

  • 35 cm3 or 130 cm3 PBN crucible

  • Excellent thermal isolation between low temperature reservoir and hot cracking zone

  • Integrated water cooling for cracker stage

  • Integrated rotary shutter

Download IconData Sheet


The Thermal Cracker Cell TCC is an effusion cell equipped with a cracker stage with integrated water cooling shroud on its space-saving DN40CF (O.D. 2.75") flange. The cell features a crucible size of 35 cm3 or 130 cm3 which is sufficient for most R&D applications.

The TCC is designed for evaporation of materials at operation temperatures from 100°C  to 650°C with an additional cracker stage on the end of the injector tube that provides temperatures up to 1300°C.

The crucible is heated by a tantalum wire heater. The standard crucible material suitable for most evaporants is PBN.

The shielding of the crucible is reduced to optimize the cell for low temperature operation. That way a good flux control for high vapor pressure materials is possible without using an additional valve.

The crucible and cracker zones are shrouded by water cooling therefore the thermal load on the chamber is neglectable.
TCC zones

 TCC zones

click to enlarge image
TCC time-temperature diagramm for heating of the cracker only
The aim of the TCC is to reduce the thermal crosstalk of the cracker and the reservoir.

This is realized by excellent thermal insulation between the low temperature reservoir and the hot cracking zone.

The figure on the left shows the temperature response of tube and crucible in case of heating the cracker only.

The temperature is measured by thermocouples on application critical positions: within the cracker zone, the tube and at the bottom of the crucible.

Even at cracker temperatures around maximum temperature of 1300°C the temperatures of tube and crucible stay unaffected to a large extend.



A source concept like this is used for high vapor pressure materials, which form atom clusters. Typical evaporation elements are As, Se, Sb, Te, Mg.

Technical data

Mounting flange DN40CF (O.D. 2.75")
In-vacuum length L 220 mm or 287 mm
In-vacuum maximum total length TL 240 mm or 307 mm
Maximum airside length OL 405 mm
In-vacuum diameter D 36 mm
Maximum airside radius AR 106 mm
Shutter distance DS 15 mm
Shutter opening angle 90° ccw
Bakeout temperature 200°C
Cooling water flow 30-90 l/h
Weight 13 kg
Maximum chamber pressure 10-5 mbar

Heater type Ta wire filament
Thermocouple NiCr/NiAl (type K)
Operating temperature 100°C – 650°C
Outgassing temperature Up to 700°C
Cooling Integrated water cooling shroud
Crucible capacity 35 cm3 or 130 cm3
Crucible material PBN

Heater type Ta wire filament
Thermocouple W5%Re/W26%/Re (type C)
Operating temperature 200°C – 800°C
Outgassing temperature Up to 850°C
Cooling None
Tube material PBN

Heater type Ta wire filament
Thermocouple W5%Re/W26%/Re (type C)
Operating temperature 300°C – 1200°C
Outgassing temperature Up to 1300°C
Cooling Integrated water cooling shroud
Cracking insert material PBN



The most commonly used crucible material suitable for most evaporants is PBN; other materials are available as required. Please refer to the Selection Guide or inquire for detailed recommendations. For information on crucibles see Crucibles.



Schematic drawing TCC Schematic drawing of the Thermal Cracker Cell TCC

(drawing shows
TCC 40-130-54-KS)


Specific data

For general information on CF mounting flanges see Flange and Gasket dimensions.


[cm³] [mm] [mm]/[mm] [W] / [A] Product code Product code
TCC 40 - 35 - 37 - K S- LxxxD36 reservoir 300/8
tube 100/5
cracker 150/8
PS 36-12
PS 36-12**
PS 36-12
PBN 35-37
TCC 40 - 130 - 54 - K S- LxxxD36 reservoir 400/8
tube 100/5
cracker 150/8
PS 60-10
PS 36-12**
PS 36-12
PBN 130-54
* rotary shutter possible on same flange
** optional
*** specify UHV length L with order (L=220 mm or L=287 mm)


Product code:
e.g. TCC 40-130-54-KS-P-L220C36

is a Thermal Cracker Cell on DN40 CF-flange for an 130 cm³ crucible (lip Ø 54 mm), with integrated water cooling shroud, shutter, PBN crucible, in-vacuum length 220 mm and outer diameter 36 mm.