MBE Components, Thermal Cracker Cell TCC

TCC

Thermal Cracker Cell

TCC 40-130-54-KS
  • Full PBN solution for corrosive materials like Te, Sb, Se, As, Mg

  • DN40CF (2.75" O.D.) mounting flange compatible with all MBE systems

  • Thermal cracking up to 1300°C 

  • 35 cm3 or 130 cm3 PBN reservoir 

  • Excellent thermal isolation between low temperature reservoir and hot cracking zone

  • Integrated water cooling for cracker stage

  • Integrated rotary shutter

TCC 40-130-54-KS with integrated cooling shroud and shutter on DN40CF (O.D. 2.75") flange with 130 cm³ crucible

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The Thermal Cracker Cell TCC is an effusion cell equipped with a cracker stage with integrated water cooling shroud on its space-saving DN40CF (2.75") flange. The cell features a crucible size of 35 cm3 or 130 cm3 which is sufficient for most R&D applications.

The TCC is designed for evaporation of materials at operation temperatures from 100°C  to 650°C with an additional cracker stage on the end of the injector tube that provides temperatures up to 1300°C.

The crucible is heated by a tantalum wire heater. The standard crucible material suitable for most evaporants is PBN.

The shielding of the crucible is reduced to optimize the cell for low temperature operation. That way a good flux control for high vapor pressure materials is possible without using an additional valve.

The crucible and cracker zones are shrouded by water cooling therefore the thermal load on the chamber is neglectable.




 

TCC zones

 TCC zones

click to enlarge image
TCC time-temperature diagramm for heating of the cracker only
The aim of the TCC is to reduce the thermal crosstalk of the cracker and the reservoir.

This is realized by excellent thermal insulation between the low temperature reservoir and the hot cracking zone.

The figure on the left shows the temperature response of tube and crucible in case of heating the cracker only.

The temperature is measured by thermocouples on application critical positions: within the cracker zone, the tube and at the bottom of the crucible.

Even at cracker temperatures around maximum temperature of 1300°C the temperatures of tube and crucible stay unaffected to a large extend.

Application

A source concept like this is used for high vapor pressure materials, which form atom clusters. Typical evaporation elements are As, Se, Sb, Te, Mg.

Technical Data

General
Port to chamber DN40CF (2.75” O.D.)
In vacuum diameter 36 mm
Bakeout temperature 200°C
Shutter opening angle 90° ccw
Cooling water flow 30-60 l/h
Weight 13 kg
Maximum chamber pressure 10-5 mbar
Crucible capacity
35 cm³ or 130 cm³
Heater type
tantalum wire filament
Cooling integrated water cooling shroud
Operating temperature
100°C - 650°C
Maximum temperature
750°C
Thermocouple
NiCr/NiAl (type K)
Injector tube
Length of tube
220 mm or 287 mm
Heater type
tantalum wire filament
Cooling none
Operating temperature 200°C - 750°C
Thermocouple
W5%Re/W26%Re (type C)
Cracker
Heater type
tantalum wire filament
Cooling
integrated water cooling shroud
Operating temperature 300°C - 1200°C
Maximum temperature 1300°C
Thermocouple
W5%Re/W26%Re (type C)
Cracking insert PBN


Crucibles

The most commonly used crucible material suitable for most evaporants is PBN; other materials are available as required. Please refer to the Selection Guide or inquire for detailed recommendations. For information on crucibles see Crucibles.



Dimensions

Schematic drawing TCC Schematic drawing of the Thermal Cracker Cell TCC

(drawing shows
TCC 40-130-54-KS)



Specific data

For general information on CF mounting flanges see Flange and Gasket dimensions.

[cm³] [mm] [mm] / [mm] [W] / [A] Product code Product code
TCC 40 - 35 - 37 - K S- P - LxxxDyy 130 / 8 2x PS 30-10 ¹ PBN 35-37
TCC 40 - 130 - 54 - K S- P - LxxxDyy 130 / 8 2x PS 30-10 ¹ PBN 130-54
* rotary shutter possible on same flange      ¹ Power supplies for reservoir and cracker heater. For optional pipe heater a third power supply is needed.
** PBN standard, other materials on request
*** specify UHV length L with order


Product code:

e.g. TCC 40-130-54-KS-P-L 220C36

is a Thermal Cracker Cell on DN40 CF-flange for an 130 cm³ crucible (lip Ø 54 mm), with integrated water cooling shroud, shutter, PBN crucible, in-vacuum length 220 mm and outer diameter 36 mm.