MBE Components, Cooling Shrouds CS


Cooling Shrouds


CS 100-63
CS 100-63-S, water cooling shroud with integrated shutter on a DN100CF (O.D. 6") flange, fitting to a DN63CF (O.D. 4.5") source flange
  • Many different types of cooling shrouds

  • Flange adaption of evaporation sources to many MBE systems

  • Closed cooling option (-C): protection against contamination of chamber and source

  • Integrated shutter option (-S)

  • Water or liquid nitrogen cooling


The separate cooling shrouds can be used in combination with evaporation sources that have no integrated water cooling. Due to their all-stainless steel construction, they are bakeable up to 250°C (TC reading 400°C) without water flow.

CSS 63-40-S

CS 63-40-S water cooling shroud on a DN63CF (O.D. 4.5") flange with integrated shutter

Furthermore, the option "closed cooling" (-C) is available for CS type cooling shrouds. In this case the cooling tube is welded directly onto the flange.

CS 63-40-C

CS water cooling shroud with "closed cooling" option CS 63-40-C

Cooling shrouds fit most port flanges DN63CF or larger. They are equipped with a mounting flange to the port and a source flange which corresponds with the mounting flange of the evaporation source. Instead of an additional flange (designs CSS/CSR) a zero-length adapter flange can be used as mounting flange as well as source flange (design CS).

CSF 100-63T

CSF 100-63T water cooling shroud on a DN100CF (O.D. 6.0") flange, with DN63CF (O.D. 4.5")

Our cooling shrouds are compatible with most MBE systems as for example Riber, VG Semicon, Varian, Eiko, DCA, Veeco, Applied Epi and Omicron. For other systems please specify mounting flange, in-vacuum length, in-vacuum diameter, substrate size and the distance from cell orifice to the substrate.

CSR 125-150
CSR 125-150 water cooling shroud with a DN125CF (O.D. 6.75") mounting flange and DN150CF (O.D. 8.0") source flange

Cooling shrouds with mounting flange sizes from DN63CF up to DN200CF are available (see Specific data table below).

CS 200-150
CS 200-100 water cooling shroud on a DN200CF (O.D. 10") flange


Cooling and Shutter Options

We offer water cooling shrouds. Liquid nitrogen (LN) cooling is possible for some shrouds on request. Optionally we offer shrouds with the cooling tube welded directly onto the flange ("closed cooling" option -C).
CS and CSS cooling shrouds are available with additional shutter (option -S). The shutter rod is guided in a tube inside the cooling shroud and a DN16CF flange is added to the mounting flange to carry the rotary shutter feedthrough. For automated processes we offer electrically driven soft-acting rotary shutter modules RSM in combination with shutter control units SCU.
For general information on CF mounting flanges see Flange, Gasket and Tube Dimensions.



Click onto the drawings to get a higher resolution of the image.

click to enlarge

Schematic drawing of the Cooling Shroud CS with zero-length adapter flange and shutter option -S

(drawing shows CS 63-40-S)

click to enlarge

Schematic drawing of the Cooling Shroud CS with zero-length adapter flange and option "closed cooling" -C

(drawing shows CS 63-40-C)

click to enlarge

Schematic drawing of the Cooling Shroud CSF with with tapped DN63CF (O.D. 4.5") source flange 

(drawing shows CSF 100-63T)

click to enlarge

Schematic drawing of the Cooling Shroud CSR, with throughout cooling tube and additional DN150CF (O.D. 8.0") source flange

(drawing shows CSR 125-150)


Specific data

For general information on CF mounting flanges see Flange and Gasket dimensions.

images/header_mounting_flange.gif images/header_source_flange.gif images/header_options.gif images/header_ln2_cooling.gif images/header_shroud_length.gif images/header_tube_ld.gif images/header_adapter_length.gif
[mm] / [mm] [mm] [mm]
CS 63 - 40 - C-, S*- LxxxD58 SLxxx** 39 17.4
CS 100 - 40 - S*- LN - LxxxD95 SLxxx** 39 19.9
CS 100 - 63 - C-, S*- LxxxD95 SLxxx** 72 19.9
CS 150 - 100 - C-, S*- LxxxD145 SLxxx** 100 22.3
CS 200 - 150 - C-, S*- LxxxD190 SLxxx** 160 24.6
CSS 63 - 40 - S*- LxxxD58 SLxxx** 39 90.0
CSS 100 - 63 - S*- LN - LxxxD95 SLxxx** 65 100.0
CSR 63 - 40 - LxxxD57 ALxxx 39 = AL
CSR 100 - 63 - LxxxD95 ALxxx 65 = AL
* rotary shutter possible on same flange
** omitted when not specified
*** specify UHV length L with order


Product code:

e.g. CSS 100-63-S-L290D95

is a water cooling shroud with DN100CF mounting flange and additional DN63CF source flange, integrated shutter; in-vacuum length 290 mm and diameter 95 mm.