MBE Components, Cooling Shrouds CS

CS

Cooling Shrouds

CS 100-63
  • Compatible with most MBE systems

  • Highest welding and steel quality

  • Different kinds of cooling shrouds

  • Water or liquid nitrogen cooling

  • Optional: integrated shutter

CS 100-63-S, water cooling shroud with integrated shutter on a DN100 CF (O.D. 6") flange, fitting to a DN63 CF (O.D. 4.5") source flange


The separate cooling shrouds can be used in combination with evaporation sources that have no integrated water cooling on their mounting flange. Due to their all stainless steel construction they are bakeable up to 400°C without water flow.


CSS 63-40-S

CS 63-40-S, water cooling shroud on a DN63CF (O.D. 4.5") flange with integrated shutter

Furthermore the option "closed cooling" -C is available for CS type cooling shrouds. In this case the cooling tube is welded directly onto the flange.

CS 63-40-C

CS water cooling shroud with "closed cooling" option CS 63-40-C

Water cooling shrouds fit most port flanges DN63 CF or larger. They are equipped with a mounting flange to the port and a source flange which corresponds with the mounting flange of the evaporation source. Instead of an additional flange (designs CSS/CSR) a zero-length adapter flange can be used as mounting as well as source flange (design CS).

CSS 63-40-S

CSS 63-40-S, water cooling shroud on a DN63CF (O.D. 4.5") flange, with additional source flange DN40CF (O.D. 2.75") and integrated shutter

Our cooling shrouds are compatible with most MBE systems as for example Riber, VG Semicon, Varian, Eiko, DCA, Veeco Applied Epi and Omicron. For other systems please specify mounting flange, in-vacuum length, in-vacuum diameter, substrate size and the distance from cell orifice to the substrate.

CSR 63-40

CSR 63-40, water cooling shroud with a DN63CF (O.D. 4.5") mounting flange and DN40CF (O.D. 2.75") source flange; zero in-vacuum length SL

Cooling shrouds with mounting flange sizes from DN63CF up to DN200CF are available (see table below "Specific Data"). The foto on the right shows CS 200-150.

CS 200-150

CS 200-100, water cooling shroud on a DN200CF (O.D. 10") flange


Cooling and Shutter Options

We offer water cooling shrouds (liquid nitrogen cooling, LN, is possible with some shrouds on request). Optionally we offer shrouds with the cooling tube welded directly on the flange ("closed cooling", option C).
CS and CSS cooling shrouds are available with additional shutter (option S). The shutter rod is guided in a tube inside the cooling shroud and a DN16 CF flange is added to the mounting flange to carry the rotary shutter feedthrough. For automated processes we offer electrically driven soft-acting rotary shutter modules RSM in combination with shutter control units.


Dimensions

Schematic drawing CS

Schematic drawing of the Cooling Shroud CS, with zero-length adapter flange

(drawing shows CS 100-63)

Schematic drawing CSS

Schematic drawing of the Cooling Shroud CSS, with with additional source flange 

(drawing shows CSS 63-40-S)

Schematic drawing CSR

Schematic drawing of the Cooling Shroud CSR, with additional source flange

(drawing shows CSR 100-63)



Specific data

For general information on CF mounting flanges see Flange and Gasket dimensions.

images/header_mounting_flange.gifimages/header_source_flange.gifimages/header_options.gifimages/header_ln2_cooling.gifimages/header_shroud_length.gifimages/header_tube_ld.gifimages/header_adapter_length.gif
[mm] / [mm] [mm] Product code
CS 63 - 40 - C-, S*- LxxxD58 SLxxx** 39 17.4
CS 100 - 40 - S*- LN - LxxxD95 SLxxx** 39 19.9
CS 100 - 63 - C-, S*- LxxxD95 SLxxx** 72 19.9
CS 150 - 100 - C-, S*- LxxxD145 SLxxx** 100 22.3
CS 200 - 150 - C-, S*- LxxxD190 SLxxx** 160 24.6
CSS 63 - 40 - S*- LxxxD58 SLxxx** 39 90.0
CSS 100 - 63 - S*- LN - LxxxD95 SLxxx** 65 100.0
CSR 63 - 40 - LxxxD57 ALxxx 39 = AL
CSR 100 - 63 - LxxxD95 ALxxx 65 = AL
* rotary shutter possible on same flange
** omitted when not specified
*** specify UHV length L with order


Product code:

e.g. CSS 100-63-S-L290D95

is a water cooling shroud with DN100 CF mounting flange and additional DN63 CF source flange, integrated shutter; in-vacuum length 290mm and diameter 95mm.