CS
Cooling Shrouds
CS 100-63-S, water cooling shroud with integrated shutter on a DN100CF (O.D. 6") flange, fitting to a DN63CF (O.D. 4.5") source flange
-
Many different types of cooling shrouds
-
Flange adaption of evaporation sources to many MBE systems
-
Closed cooling option (-C): protection against contamination of chamber and source
-
Integrated shutter option (-S)
-
Water or liquid nitrogen cooling
|
The separate cooling shrouds can be used in combination with evaporation sources that have no integrated water cooling. Due to their all-stainless steel construction, they are bakeable up to 250°C (TC reading 400°C) without water flow. |
 CS 63-40-S water cooling shroud on a DN63CF (O.D. 4.5") flange with integrated shutter |
|
Furthermore, the option "closed cooling" (-C) is available for CS type cooling shrouds. In this case the cooling tube is welded directly onto the flange. |
CS water cooling shroud with "closed cooling" option CS 63-40-C |
|
Cooling shrouds fit most port flanges DN63CF or larger. They are equipped with a mounting flange to the port and a source flange which corresponds with the mounting flange of the evaporation source. Instead of an additional flange (designs CSS/CSR) a zero-length adapter flange can be used as mounting flange as well as source flange (design CS). |
CSF 100-63T water cooling shroud on a DN100CF (O.D. 6.0") flange, with DN63CF (O.D. 4.5") |
|
Our cooling shrouds are compatible with most MBE systems as for example Riber, VG Semicon, Varian, Eiko, DCA, Veeco, Applied Epi and Omicron. For other systems please specify mounting flange, in-vacuum length, in-vacuum diameter, substrate size and the distance from cell orifice to the substrate. |
|
|
Cooling shrouds with mounting flange sizes from DN63CF up to DN200CF are available (see Specific data table below). |
|
Cooling and Shutter Options
We offer water cooling shrouds. Liquid nitrogen (LN) cooling is possible for some shrouds on request. Optionally we offer shrouds with the cooling tube welded directly onto the flange ("closed cooling" option -C).
CS and CSS cooling shrouds are available with additional shutter (option -S). The shutter rod is guided in a tube inside the cooling shroud and a DN16CF flange is added to the mounting flange to carry the rotary shutter feedthrough. For automated processes we offer electrically driven soft-acting rotary shutter modules RSM in combination with shutter control units SCU.
For general information on CF mounting flanges see Flange, Gasket and Tube Dimensions.
Dimensions
Click onto the drawings to get a higher resolution of the image.
 |
Schematic drawing of the Cooling Shroud CS with zero-length adapter flange and shutter option -S |
 |
Schematic drawing of the Cooling Shroud CS with zero-length adapter flange and option "closed cooling" -C |
 |
Schematic drawing of the Cooling Shroud CSF with with tapped DN63CF (O.D. 4.5") source flange |
 |
Schematic drawing of the Cooling Shroud CSR, with throughout cooling tube and additional DN150CF (O.D. 8.0") source flange |
Specific data
For general information on CF mounting flanges see Flange and Gasket dimensions.
 |
 |
 |
 |
 |
 |
 |
 |
 |
|
|---|---|---|---|---|---|---|---|---|---|
| [mm] / [mm] | [mm] | [mm] | |||||||
| CS | 63 - | 40 - | C-, S*- | LxxxD58 | SLxxx** | 39 | 17.4 | ||
| CS | 100 - | 40 - | S*- | LN - | LxxxD95 | SLxxx** | 39 | 19.9 | |
| CS | 100 - | 63 - | C-, S*- | LxxxD95 | SLxxx** | 72 | 19.9 | ||
| CS | 150 - | 100 - | C-, S*- | LxxxD145 | SLxxx** | 100 | 22.3 | ||
| CS | 200 - | 150 - | C-, S*- | LxxxD190 | SLxxx** | 160 | 24.6 | ||
| CSS | 63 - | 40 - | S*- | LxxxD58 | SLxxx** | 39 | 90.0 | ||
| CSS | 100 - | 63 - | S*- | LN - | LxxxD95 | SLxxx** | 65 | 100.0 | |
| CSR | 63 - | 40 - | LxxxD57 | ALxxx | 39 | = AL | |||
| CSR | 100 - | 63 - | LxxxD95 | ALxxx | 65 | = AL |
| * | rotary shutter possible on same flange |
| ** | omitted when not specified |
| *** | specify UHV length L with order |
Product code:
e.g. CSS 100-63-S-L290D95
is a water cooling shroud with DN100CF mounting flange and additional DN63CF source flange, integrated shutter; in-vacuum length 290 mm and diameter 95 mm.
