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Precise substrate rotation control
Brushless motor for high reliability and constant speed under variable load
Manual or remote operation
19" rack system compatible
The Manipulator Control Unit - MCU provides the power for the motor, which rotates the substrate or substrate holder of a manipulator. Manual and remote control of rotation speed, direction of rotation and start/stop is possible. The control signals can be set manually, with TTL signals or with external relays. For remote setting of the rotation speed an analogue signal can be used optionally. |
Motor with motor mount and feedthrough |
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The front panel's height is 3 U (128.4mm) and the width is 20 HP (101.3mm). The installation depth is 170mm and requires an additional space of about 50mm at the back side for the connectors. The figure on the right shows the front panel of the manipulator control unit. |
MCU front panel |
The use of the MCU is recommended for all our substrate manipulators, e.g. SH 200-4G50.
The MCU can of course also be used for any other application where a continuous rotation with precise speed control is required.