Quartz crystal microbalance for thin-film measurements
Compatible with most oscillator devices
Mounting Flange DN40CF (2.75” O.D.), rotatable
Linear travel 150 mm, 200 mm or 250 mm
Bakeable up to 250°C
This standard quartz crystal microbalance can be used for in situ flux calibration in many MBE applications. Due to the linear travel it is possible to move the quartz directly under the substrate for accurate rate measurements.
The main component is a gold plated piezo crystal which oscillates with its natural frequency. If material hits the quartz surface and sticks there the mass of the quartz will change. The change of mass results in a change of the natural frequency which will be detected.
QCM oscillator head with sight of gold plated piezo crystal
Typical applications for the QCM Quartz Crystal Monitor are:
- Flux calibration of effusion cells with regard to the cell temperature
- Uniformity measurements using the linear travel to measure the flux rate at different positions
- In-situ thickness control during the MBE process
|Mounting flange||DN40CF (O.D. 2.75") [mm / inch]; port I.D. ≥ 35 mm|
|Linear travel||150 mm
others on request
|Bakeout temperature||up to 250 °C|
|Cooling water||2 x Swagelok Ø 8 mm|
|Measurement range||depends on oscillator device|
|Schematic drawing of the Quartz Crystal Monitor QCM
E represents the internal length of the linear travel. S represents the available linear travel.
L is defined for the situation of fully retracted linear shift as pictured in the drawing.
The lenght E varies with the maximum shift S. Please choose from the following table:
|Variable S||Variable E|
For general information on CF mounting flanges see Flange and Gasket dimensions.
|[mm]||[mm] / [mm]|
|QCM||40 -||150 -||LxxxD35|
|QCM||40 -||200 -||LxxxD35|
|QCM||40 -||250 -||LxxxD35|
e.g. QCM 40-200-L100D35
is a quartz crystal monitor on DN40CF-flange with 200 mm shift, integrated water cooling , retracted in-vacuum length L = 100 mm and extended length S+L = 300 mm. The center of the active quartz surface is located at S+L-13 mm = 387 mm.
The surrounding tube has to have an inner diameter ≥35 mm.