MBE Components, Gas Sources

Gas Sources

Hydrogen Atom Beam Source
HABS

Oxygen Atom Beam Source
OBS

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Silicon Sublimation Dopant Source SUSI-D Oxygen Atom Beam Source OBS transfer rod mask Crucibles CRU WH thermal gas cracker Cs/Rb-Valved Alkali Metal Source AKS Viewport Shutter FSH OME PEZ OLED linear source Carbon Sublimation Source SUKO valved source CIGS source shutter module metal evaporation Industrial Point Sources Beamfluxmonitor BFM VSS heated stage sulfur thermal deposition source Valved GaP Compound Source VGCS Soft-acting Rotary Shutter Module RSM plasma source Substrate Manipulator SH organic deposition system HTEZ buffer chamber k-cell

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