MBE Components, Gas Sources

Gas Sources

Hydrogen Atom Beam Source HABSHydrogen Atom Beam Source
HABS
Oxygen Atom Beam Source OBSOxygen Atom Beam Source
OBS
Thermal Gas Injector TGIThermal Gas Injector
TGI
Plasma Source RFPPlasma Source
RFP
In-situ Etching System ISESIn-situ Etching System
ISES
 
 
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VCS SH OME wafer holder Soft-acting Linear Shutter Module LSM atomic hydrogen Knudsen cell molecular beam epitaxy system HV in-situ characterization tool OLED MBE Multiprobe Systems DECO MCU II-VI MBE thermal evaporation In-situ Etching System ISES SiC heater valved cracker valved sources Linear Sources LEZ Standard Electron Beam Evaporator EBV Thin Film Sources organic deposition system wire heater SCU Molekularstrahlepitaxie Ga-trapping-cap system cracking cell pneumatic shutter