MBE Components, Gas Sources

Gas Sources

Hydrogen Atom Beam Source HABSHydrogen Atom Beam Source
HABS
Oxygen Atom Beam Source OBSOxygen Atom Beam Source
OBS
Thermal Gas Injector TGIThermal Gas Injector
TGI
Plasma Source RFPPlasma Source
RFP
 
 
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references Karl Eberl mbe systems Oxygen Atom Beam Source OBS ozone Vakuumsublimation Substrate Manipulator SH Silicon Sublimation Dopant Source SUSI-D Crucibles CRU Cs/Rb-Valved Alkali Metal Source AKS valved corrosive material cracker source vccs shutter thermal evaporator RPM tilted sources evaporation source graphenes Industrial Point Sources in-situ monitoring organic MBE mask Doping Effusion Cell EZ Beamfluxmonitor BFM Valved GaP Compound Source VGCS VSS atomic hydrogen source RTA system S controller rapid thermal annealing