MBE-Components, Organic Material Effusion Cell OEZ

OEZ

Organic Material Effusion Cells

 

OEZ 40-10-22-S
Organic Material Effusion Cells OEZ 40-10-22-S: OEZ source with 10 cm³ crucible, mounted on a DN40CF (O.D. 2.75‘‘) flange, with integrated rotary shutter

  • Controlled evaporation of volatile organic materials in research and industry

  • Fabrication of OLED and organic photovoltaic cells, or spintronic devices

  • Precise deposition with no temperature overshoot (stability to ±0.05K)

  • Operating temperatures 50 - 700 °C

  • 2 to 8-fold cluster arrays are offered for co-deposition processes

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Thermal evaporators of the OEZ type are dedicated to the controlled evaporation of all kind of volatile organic materials. They can be used for research or production of e.g. OLED devices, organic photovoltaic cells, molecular electronics, organic spintronics, etc.

The OEZ product line denotes a group of diversified sources that are all characterized by excellent temperature stability, homogeneous temperature distribution within the crucible and a wide temperature range from 50 to 700 °C.

Several features and options make the OEZ a workhorse, suitable for research as well as industrial applications.

The PID controlled temperature stability of ±0.05 K allows precise control of the deposition rate. By design temperature hotspots and overshooting are effectively eliminated, which prevents decomposition of the organic material.

OEZ 63-35-33-S

Organic Effusion cell OEZ 63-35-33-S: OEZ source with 35 cm³ crucible, mounted on a DN63CF (O.D. 4.5‘‘) flange, with integrated water cooling and rotary shutter

 

Optional beam shaping devices allow high film thickness homogeneity of the evaporated molecules along with an efficient material utilization. On request the plume shape can be projected by Monte Carlo method simulations.

Depending on the crucible size, OEZ cells can be used for evaporation of small amounts of expensive materials (for fundamental research applications) or deposition of large amounts of organics (in industrial production processes). Crucible replacement is easy and quickly accomplished. While quartz is the preferred material for the evaporation of organics, others like PBN, Alumina, or graphite are available as well.

 

Various models with single or multiple cells on the same flange ensure adaptability to miscellaneous organic thin film applications. The range of crucibles starts with 0.2 cm³ crucibles for small sample preparation in, e.g., surface science and reasonably ends with 25 cm³ crucibles for samples of several inches diameter.

With the rugged and reliable design, inherent to every OEZ, long and stable operation - a basic requirement for industrial and reasearch use - is guaranteed.

With integrated cell shutters both controlled sub-monolayer deposition and growth of thicker closed films is possible. An automated shutter actuation can be accomplished by applying electrical or pneumatic add-on shutter modules to the assembly, as shown in right-hand figure.

OEZ 00-12-37

Organic effusion cells OEZ 00-12-37: Four free-standing 12 cm³ cells without mounting flanges, custom- tailored for co-deposition in small OLED pilot deposition system.

 

Technical data
Mounting flange Ta wire heating filament: standard (SF), hot lip (HL), cold lip (CL), dual (DF)
Filament NiCr/NiAl (type K)
Temperature sensor max. 1500°C
Bakeout temperature 250°C
Operating temperature 700-1400°C
Crucible capacity integrated water cooling or separate cooling shroud
Crucible material 2-200 cm³; PBN, PG, Al2O3 crucibles (other materials on request)
Cooling integrated water cooling (K), integrated rotary shutter (S)
Shutter integrated rotary shutters (S)

 

Dimensions

Schematic drawing OEZ Schematic drawing of a dual Organic Material Effusion Cell OEZ 

(drawing shows
OEZ 40-10-22-KS)

 

Specific data

For general information on CF mounting flanges see Flange and Gasket dimensions.

[cm³] [mm] Type Type [mm] / [mm] [W] / [A] Product code Product code
OEZ 40 - 2 - 16 - K S - SF¹ - K - Q - LxxxD34 140 / 7 PS 15-10 Quartz 2-16
OEZ 40 - 10 - 22 - K S - SF² - K - Q - LxxxD36 240 / 8 PS 30-10 Quartz 10-22
OEZ 63 - 35 - 34 - K S - SF² - K - Q - LxxxD34 450 / 11 PS 40-19 Quartz 35-34
OEZ 63 - 60 - 37 - K S - SF² - K - Q - LxxxD58 700 / 12 PS 40-19 Quartz 60-37
* rotary shutter possible on same flange      ¹ alternatively CL
** Quartz standard, other materials on request ² alternatively CL, HL or DF
*** specify UHV length L with order

 


Product code:

e.g. OEZ 63-60-37-KS-DF-K-Q-L270D58

is an organic effusion cell on DN63 CF-flange for a 60cm³ crucible (lip Ø 37mm), integrated water cooling shroud, shutter, dual filament, type K thermocouple, Quartz crucible, in-vacuum length 270mm and diameter 58mm.