MBE-Components, Organic Material Effusion Cell OEZ


Organic Material Effusion Cells


 OEZ 40-10-22-S
Organic Material Effusion Cell OEZ 40-10-22-S with 10 cm³ crucible, mounted on a DN40CF (O.D. 2.75‘‘) flange, with integrated water cooling and integrated rotary shutter
  • Controlled evaporation of volatile organic materials in research and industry

  • Fabrication of OLED and organic photovoltaic cells, or spintronic devices

  • Precise deposition with no temperature overshoot (stability to ±0.05K)

  • Operating temperatures 50 - 700 °C

  • Dual and quad cluster arrays are offered for co-deposition processes

  • ISO-K and KF cells available for HV applications

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Related products


OEZ thermal evaporators are designed for the controlled evaporation of all types of volatile organic materials. They can be used for research or production of e.g. OLED devices, organic photovoltaic cells, molecular electronics, organic spintronics, etc.

The OEZ product line is a group of diversified sources, all characterized by excellent temperature stability, homogeneous temperature distribution within the crucible and a wide temperature range from 50 to 700 °C.

Several features and options make the OEZ a workhorse for both research and industrial applications.

The PID controlled temperature stability of ±0.05 K allows precise control of the deposition rate. The design effectively eliminates temperature hotspots and overshooting, preventing decomposition of the organic material.

OEZ 63-35-33-S

Organic Effusion cell OEZ 63-35-33-S with 35 cm³ crucible, mounted on a DN63CF (O.D. 4.5‘‘) flange, with integrated water cooling and rotary shutter


Optional beam shaping devices allow high film thickness homogeneity of the evaporated molecules along with efficient material utilization.
Depending on the crucible size, OEZ cells can be used for the evaporation of small amounts of expensive materials (for fundamental research applications) or for the deposition of large amounts of organics (in industrial production processes).
Crucible replacement is quick and easy. While quartz is the preferred material for organic evaporation, other materials such as PBN, alumina or graphite are available.


Different models with single or multiple cells on the same flange ensure adaptability to different organic thin film applications. Crucible sizes range from 0.2 cm3 crucibles for small sample preparation, such as surface science, to 200 cm3 crucibles for samples several inches in diameter.

The rugged and reliable design inherent in every OEZ ensures long and stable operation - a basic requirement for industrial and research use.

Integrated cell shutters allow controlled sub-monolayer deposition as well as growth of thicker closed films. Automated shutter actuation can be achieved by adding electrical or pneumatic shutter modules to the assembly.

For HV applications, ISO-K and KF cells are available as shown in the figure to the right.

OEZ 50K-11-37-KKS

Organic effusion cell OEZ 50K-11-37-KKS on KF flange


Technical data

Filament type
Ta wire heating filament: standard (SF), hot lip (HL), cold lip (CL), dual (DF)
Thermocouple NiCr/NiAl (type K)
Operating temperature
Outgassing temperature max. 1100°C
Bakeout temperature 250°C
Cooling integrated water cooling or separate cooling shroud
0.2-200 cm³; Quartz, PBN, Al2O3 (other materials on request)
Options integrated water cooling (K or KK), integrated rotary shutter (S)



Schematic drawing OEZ Schematic drawing of an Organic Material Effusion Cell OEZ 

(drawing shows
OEZ 40-10-22-KS)


Specific data

Flange sizes marked with the letter "K" indicate KF flanges or ISO-K flanges. All flange sizes without an additional letter indicate CF flanges.

For general information on CF mounting flanges see Flange and Gasket dimensions.

[cm³] [mm] Type Type [mm] / [mm] [W] / [A] Product code Product code
OEZ 40 - 2 - 16 - K S - SF¹ - K - Q - LxxxD34 140 / 7 PS 15-10 Quartz 2-16
OEZ 40 - 10 - 22 - K S - SF² - K - Q - LxxxD36 240 / 8 PS 30-10 Quartz 10-22
OEZ 50K - 11 - 37- KK S - SF² - K - Q - LxxxD46 200 / 10 PS 30-10 Quartz C11-37
OEZ 63 - 35 - 34 - K S - SF² - K - Q - LxxxD34 450 / 11 PS 40-19 Quartz 35-34
OEZ 63 - 60 - 37 - K S - SF² - K - Q - LxxxD58 700 / 12 PS 40-19 Quartz 60-37
* rotary shutter possible on same flange      ¹ alternatively CL
** Quartz standard, other materials on request ² alternatively CL, HL or DF
*** specify UHV length L with order


Product code:

e.g. OEZ 63-60-37-KS-DF-K-Q-L270D58

is an organic effusion cell on DN63 CF-flange for a 60cm³ crucible (lip Ø 37mm), integrated water cooling shroud, shutter, dual filament, type K thermocouple, Quartz crucible, in-vacuum length 270mm and diameter 58mm.


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