Controlled evaporation of volatile organic materials in research and industry
Fabrication of OLED and organic photovoltaic cells, or spintronic devices
Precise deposition with no temperature overshoot (stability to ±0.05K)
Operating temperatures 50 - 700 °C
2 to 8-fold cluster arrays are offered for co-deposition processes
Thermal evaporators of the OEZ type are dedicated to the controlled evaporation of all kind of volatile organic materials. They can be used for research or production of e.g. OLED devices, organic photovoltaic cells, molecular electronics, organic spintronics, etc.
The OEZ product line denotes a group of diversiﬁed sources that are all characterized by excellent temperature stability, homogeneous temperature distribution within the crucible and a wide temperature range from 50 to 700 °C.
Organic Effusion cell OEZ 63-35-33-S: OEZ source with 35 cm³ crucible, mounted on a DN63CF (O.D. 4.5‘‘) ﬂange, with integrated water cooling and rotary shutter
Optional beam shaping devices allow high ﬁlm thickness homogeneity of the evaporated molecules along with an efﬁcient material utilization. On request the plume shape can be projected by Monte Carlo method simulations.
Depending on the crucible size, OEZ cells can be used for evaporation of small amounts of expensive materials (for fundamental research applications) or deposition of large amounts of organics (in industrial production processes). Crucible replacement is easy and quickly accomplished. While quartz is the preferred material for the evaporation of organics, others like PBN, Alumina, or graphite are available as well.
Various models with single or multiple cells on the same ﬂange ensure adaptability to miscellaneous organic thin ﬁlm applications. The range of crucibles starts with 0.2 cm³ crucibles for small sample preparation in, e.g., surface science and reasonably ends with 25 cm³ crucibles for samples of several inches diameter.
With the rugged and reliable design, inherent to every OEZ, long and stable operation - a basic requirement for industrial and reasearch use - is guaranteed.
With integrated cell shutters both controlled sub-monolayer deposition and growth of thicker closed ﬁlms is possible. An automated shutter actuation can be accomplished by applying electrical or pneumatic add-on shutter modules to the assembly, as shown in right-hand ﬁgure.
Organic effusion cells OEZ 00-12-37: Four free-standing 12 cm³ cells without mounting flanges, custom- tailored for co-deposition in small OLED pilot deposition system.
|Mounting ﬂange||Ta wire heating filament: standard (SF), hot lip (HL), cold lip (CL), dual (DF)|
|Filament||NiCr/NiAl (type K)|
|Temperature sensor||max. 1500°C|
|Crucible capacity||integrated water cooling or separate cooling shroud|
|Crucible material||2-200 cm³; PBN, PG, Al2O3 crucibles (other materials on request)|
|Cooling||integrated water cooling (K), integrated rotary shutter (S)|
|Shutter||integrated rotary shutters (S)|
|Schematic drawing of a dual Organic Material Effusion Cell OEZ
For general information on CF mounting flanges see Flange and Gasket dimensions.
|[cm³]||[mm]||Type||Type||[mm] / [mm]||[W] / [A]||Product code||Product code|
|OEZ||40 -||2 -||16 -||K||S -||SF¹ -||K -||Q -||LxxxD34||140 / 7||PS 15-10||Quartz 2-16|
|OEZ||40 -||10 -||22 -||K||S -||SF² -||K -||Q -||LxxxD36||240 / 8||PS 30-10||Quartz 10-22|
|OEZ||63 -||35 -||34 -||K||S -||SF² -||K -||Q -||LxxxD34||450 / 11||PS 40-19||Quartz 35-34|
|OEZ||63 -||60 -||37 -||K||S -||SF² -||K -||Q -||LxxxD58||700 / 12||PS 40-19||Quartz 60-37|
|*||rotary shutter possible on same flange||¹||alternatively CL|
|**||Quartz standard, other materials on request||²||alternatively CL, HL or DF|
|***||specify UHV length L with order|
e.g. OEZ 63-60-37-KS-DF-K-Q-L270D58
is an organic effusion cell on DN63 CF-flange for a 60cm³ crucible (lip Ø 37mm), integrated water cooling shroud, shutter, dual filament, type K thermocouple, Quartz crucible, in-vacuum length 270mm and diameter 58mm.