Compatible with all UHV systems
Double-sided CF flange
Flange sizes DN63CF, DN100CF
Right-angle swing type shutter
Perfect view into UHV chamber due to 90° shutter opening
Actuated with rotary feedthrough
Magnetically coupled rotary feedthrough
Two different shutter blade design options
Bakeable up to 250°C
The Viewport Shutters FSH are high-quality swing shutters used to cover and protect all kinds of viewports in UHV systems.
FSH 100-A-L with flexible shutter blade in opened position
Design option A features a flexible shutter blade, that flexes and blends into the tube I.D. of the chamber port. Scratching along the tube's inner wall is prevented by small spacers. This design implements the largest achievable viewing diameter in conjunction with good shielding of the window.
FSH 100-B-L with DN100CF window attached (blade half opened)
The FSH viewport shutters are recommended for use on all viewports having direct sight into evaporation sources or onto other sources of intense heat- or vapor-beam-radiation. The effective shielding by the shutter blade reduces viewport coating and thermal stress to the window during deposition.
FSH viewport shutters are assembled with rotary motion feedthrough handle on the left side (option L) by default, as shown in the drawings below. Assembly on the opposite side (option R) on request.
The standard mounting flange type for all FSH viewport shutters is DN CF. Other flange types and sizes can be offered, too. Please specify requirements with inquiry.
Schematic drawing of the Viewport Shutter FSH - design A, feedthrough position L
Schematic drawing of the Viewport Shutter FSH - design B, feedthrough position L
||DN63 CF (O.D. 4.5")||50||56||113,5||74||50||17,5||L,R|
||DN63 CF (O.D. 4.5")||36||50||113,5||74||50||17,5||L,R|
||DN100 CF (O.D. 6")||80||92||152||95||85||20||L,R|
||DN100 CF (O.D. 6")||61||79||152||95||95||20||L,R|