Soft-acting rotary motion mechanism
Shutter action time 0.2 sec (open-close)
Automated shutter rotation with SCU
Use with mini rotary feedthrough
Feedthrough UHV compatible and bakeable up to 300°C
The Soft-acting Rotary Shutter Module - RSM - is a drive unit for rotary shutter motion. A special designed gear driven by an electric motor provides a "soft", nearly sinusoidal angular velocity profile between two angular shutter positions.
Control unit SCU for Soft-acting rotary shutter module
The RSM is designed to be mounted on a mini rotary motion feedthrough on DN16 CF (O.D. 1.33") flange. The feedthrough with welded bellows sealing mechanism transmits the rotation to the effusion cell shutter.
Soft-acting rotary shutter module mounted on a DN16 CF flange mini feedthrough
The RSM is recommended for use with rotary motion shutters for all our evaporation sources. It is mountable on most rotary motion feedthroughs. For other shutter types we provide special soft-acting solutions.
Shutter opening angles of 60°, 90°, 103°, 110° or 127° are available. Please specify when ordering.
The direction of rotary motion also is factory-preset. The standard is CCW-rotation from "close" to "open", when looking onto the shutter plate (i.e. into the crucible of the source). Specify CCW or CW rotation, when ordering.
The standard shutter speed is 0.2 s (open - close). For special applications, such as heavy shutter plates or other reasons, we provide slower versions with shutter speeds as slow as 1 s between the end positions. This is recommended for large main shutters on substrate manipulators as example.
|Schematic drawing of the Soft-acting Rotary Shutter Module RSM
(Drawing shows RSM 90 mounted on our standard shutter feedthrough)
The standard direction of rotation is CCW, from close to open.