Rotary and linear motion
Soft-acting shutter operation
Fully UHV compatible
Molybdenum shutter rod
Tantalum shutter plate
Special shutter liners as PBN, PG, Si
Easy to mount on cells and shrouds
MBE-Komponenten GmbH provides a variety of cell shutters designed for different evaporation sources and applications. Our versatile shutter equipment allows rotary or linear shutter motion, soft-acting operation and automated shutter control.
For our standard shutter we use a molybdenum shutter rod and a high-purity tantalum shutter plate which can easily be exchanged. This choice of materials guarantees clean operation even at very high shutter temperatures. Besides our standard Ta-Mo-shutter we also offer shutters made of other materials or with user-defined geometry. Special shutter plate liners are available; e.g. the shutters for carbon sublimation sources SUKO are lined with pyrolytic graphite. If possible the shutter is mounted within the cell cooling shroud. We also provide shutters for cells without cooling shroud, where the shutter rod is guided outside the effusion cell radiation-shielding.
Generally a bellows-sealed rotary motion feedthrough on a DN16 CF flange is used to drive the rotary shutter unit. We recommend to use our magnetically coupled rotary motion feedthrough MRD 16. It is leakproof and especially designed for long-life operation in UHV.
Some applications like the electron beam evaporator need linear motion shutters. These are actuated by a magnetically coupled linear feedthrough on a DN40 CF flange.
The shutter feedthrough can be operated manually or by a soft-acting shutter module.