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Large variety of particular case sources available
Customized solutions with special designs
Close collaboration with customers
Consideration of special customomers' needs
Manifacturing of every practicable request
Source clusters can add more sources to your MBE system, either as doping source or as thin-film deposition source in nanosciences. We offer a large variety of source clusters based on our standard evaporation cells with two cells mounted on a single flange. Because of the large variety of different UHV systems each cluster is individually designed. If your requirements for source clusters are more specialized than our standard Dual Cluster Sources DCS and our standard Quad Cluster Sources QCS can provide, please contact us. Our experts will consult with you for manifacturing any practically possible request.
Some examples of specialized particular source clusters are shown below:
The combination of a mini high temperature effusion cell HTEZ and a standard effusion cell WEZ, mounted on a DN63 CF (O.D. 4.5") flange is shown in the picture on the right hand side. The HTEZ includes an 1.5 cm³ Al2O3 crucible, while the WEZ is equipped with a 10 cm³ PBN crucible. The integrated water cooling shroud prevents heating of the chamber as well as thermal interaction of the individual cells. The two separate shutters allow independent operation with minimized cross contamination. |
Dual source cluster with individual shutters |
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Dual Cluster Source with DN63CF flange but with small O.D. diameter of 36 mm. |
Dual Cluster Source DCS 63-2x2-2S |
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An example for a combination of two totally different cells on one flange is shown in the following two pictures on the right. The first one shows the overall view of DCS 63-SUSI/WEZ which is a combination of a Standard Effusion Cell WEZ with rotary shutter and a Silicon Sublimation Source SUSI. |
DCS 63-SUSI/WEZ overall view Top view on DCS 63-SUSI/WEZ with insight of PBN crucible of the WEZ and the silicon filament of the SUSI |
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Customized Source Cluster for old BALZERS UHV Systems. Water cooling and individual shutters vor two WEZ source type sources. | DCS 150 |
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Two single standard effusion cells WEZ with a 10 cm³ PBN crucible in each cell are mounted in an angled position to allow the use of a horizontal port below the substrate. Each cell is equipped with an individual linear shutter. A water cooled shielding plate between the cells is thermally decoupling them effectively. |
Special 90° Dual Cluster Source with shutters mounted on a DN100CF flange. |
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This cell is designed for horizontally oriented DN63CF (O.D. 4.5”) ports. |
Dual Cluster Source OEZ 63-2x2-22-KKS-SF for horizontal orientation with linear push-pull shutter. |
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A further source cluster variant is the QCS 100 on the adjacent foto. This customized variant of QCS 100 comprises three PBN 10-22 crucibles and one conical PBN C2-22 crucible and a heater concept with two hot lip filament heaters HL, one cold lip CL and one standard filament SF heater. The shutters have a pneumatic RPM drive unit for fast rotary shutter motion. |
Quad Cluster Source QCS 100 with individual crucible sizes, individual heater variants and pneumatic rotary shutter mechanism |
Our customized source clusters are commonly used for doping or thin film applications whenever an increase of capacity of the used system is desired.
The standard crucible material is PBN, but other crucible materials are also available. Crucible sizes, shapes and material are coordinated in close collaboration with the customer respecting design and application.
The following list provides suggestions for related products. For additional product suggestions or more detailed information, please contact us.
Components
Standard Effusion Cell WEZ |
Quad Cluster Source QCS |
Low Temperature Effusion Cell NTEZ |
Accessories
Soft-acting Rotary Shutter Module RSM |
Shutter Control Unit SCU |
Quartz Crystal Monitor QCM |