|DCS 40-2x1-14-2S Dual Cluster Source on a DN40CF (O.D. 2.75'') flange with two individual shutters and integrated water cooling|
|By default the "dual" cluster sources are designed as two-cell-clusters. However we are to supply customized solutions with three or more cells, e.g., Quad Cluster Sources QCS on a single mounting flange tailored to the customer's need.
Dual Cluster Sources built on a DN40 CF (O.D. 2.75") flange comprise two crucibles and either one multi-position rotary motion shutter or two individual rotary shutters. Different crucible sizes, shapes, materials (see second foto on the right) and different thermocouples can be provided.
Dual Cluster Source DCS 40-2x1-14-S with multi-position rotary shutter and quartz crucibles on DN40CF (O.D. 2.75'') flange
Dual Cluster Sources DCS 40-2x1-14-S with multi-position shutter
In this variant is implemented one multi-position rotary shutter for various open/closed shutter position combinations that can be regulated either manually or remote by a Multi-position Shutter Control Unit MSCU.
Dual Cluster Source DCS 40-2x1-14-S with multi-position rotary shutter and crucibles of different material (PBN and PG)
Dual Cluster Source DCS 40-2x1-14-2S with two individual shutters
This solution comprises two independently adjustable non overlapping shutters that allow individual closing or opening and establish a further reduction of thermal interaction. They can shift positions within an ambient tube.
Both shutters can be regulated manually or remote by a Rotary Pneumatic Shutter Module RPM.
Two individual shutters of DCS 40-2x1-14-2S and crucibles of different material (PBN and Quartz)
Dual Cluster Source DCS 40-2x1-14-S-T with multi-position shutter and cool tube
DCS 40-2x1-14-S-T with multi-position rotary shutter and cupper cool tube attachment
The use of source clusters increases the capacity of your UHV-System, by using only a single port for two individual sources. In surface science application the product allows you to add material deposition features into your small sample preparation system or directly in a surface analysis system.
Both independent sources of the DCS are predestined for thin film applications or for doping applications (see DDS, the dual cluster cell that is explicitly optimized for doping applications). Different thermocouple options for high temperature or low temperature heaters are available. Low temperature cells are used for organic material (type K or type C thermocouple).
Many combinations of effusion cells are possible within Source Clusters.
For particular combinations or special designs like tilted angle crucibles see Customized Source Clusters.
|Mounting flange||DN40CF (O.D. 2.75")|
|Dimensions in vacuum||Length: standard 220 mm (180-400 mm on request); Diameter: 36mm|
|Distance source-sample||Typically 100 to 160 mm|
|Temperature sensor||Type K (Chromel/Alumel)||Type C (W5%Re/W26%Re)|
|Typical power consumption||500°C @ 7 W / 4 A, 1100°C @ 51 W / 7 A, 1500°C @ 112 W / 10 A|
|Crucibles||PBN, Quartz, Al2O3, etc.; Nominal charge 600 mm3|
|Cooling||Water cooled block, 30 l/h cooling water flow
Low temperature crosstalk: one cell 1300°C / second cell 150°C possible
|Shutters||integrated multi-position rotary shutter (S) or individual rotary shutters (2S)|
|The power graph on the right shows the temperature range of a DCS 40 as a function of the power consumption.
It shows typical values of one of the two effusion cells of a DCS 40 while the second cell is unimplemented.
Additionally it gives information about the reasonable dimensioning of the required power supply.
Diagram Power vs. Temperature
The nominal capacity of a crucible is 0.6 cm3 (600 mm3). The standard crucible material is PBN (PBN 1-14), but other crucible materials like PG, quartz, Al2O3 are also available.
A quartz crucible is typically used for organic material and some low temperature application. Pyrolytic graphite (PG) is available for some special evaporation materials like CaF2. Other crucible materials are available on request.
|Schematic drawing of the Dual Cluster Source DCS 40
(drawing shows DCS 40-2x1-14-2S with two integrated individual shutters)
|[cm³]||[mm]||Type||Type||[mm] / [mm]||[W] / [A]||Product code||Product code|
|DCS||40 -||2x1 -||14 -||S -||SF¹ -||C-||P -||LxxxD36||100 / 10||2x PS 15-10-C||PBN 1-14|
|DCS||40 -||2x1 -||14 -||S -||SF¹ -||K-||Q||LxxxD36||50 / 7||2x PS 15-10-C||PBN 1-14|
|DCS||40 -||2x1 -||14 -||2S -||SF¹ -||C-||P -||LxxxD36||110 / 10||2x PS 15-10-C||PBN 1-14|
|DCS||40 -||2x1 -||14 -||2S -||SF¹ -||K-||Q||LxxxD36||50 / 7||2x PS 15-10-C||PBN 1-14|
|DCS||40 -||2x1 -||14 -||S-||T-||SF¹ -||C-||P -||LxxxD36||110 / 10||2x PS 15-10-C||PBN 1-14|
|DCS||40 -||2x1 -||14 -||S -||T-||SF¹ -||K-||Q||LxxxD36||50 / 7||2x PS 15-10-C||PBN 1-14|
|DCS||40 -||2x1 -||14 -||2S-||T-||SF¹ -||C-||P -||LxxxD36||110 / 10||2x PS 15-10-C||PBN 1-14|
|DCS||40 -||2x1 -||14 -||2S -||T-||SF¹ -||K-||Q||LxxxD36||50 / 7||2x PS 15-10-C||PBN 1-14|
|*||rotary shutter possible on same flange||¹||alternatively CL|
|**||P=PBN; Q=Quartz; other materials on request|
|***||specify UHV length L with order|