|QCS 40-4x1-12 Quad Cluster Source on DN40CF flange with multi-position rotary shutter|
Source clusters can add more sources to your MBE system, either as thin-film deposition source in nanosciences or as doping source. Because of the large variety of different UHV systems each cluster is individually designed. We offer a large variety of source clusters based on our standard evaporation cells with four different cells mounted on a single flange.
By default the "quad" cluster sources are designed as four-cell-clusters. However we are to supply customized solutions with two cells, e.g., Dual Cluster Sources DCS on one mounting flange tailored to the customers' need.
The picture above shows a 4-fold source cluster with 4 x 0.2 cm³ PBN crucibles mounted on a DN40 CF (O.D. 2.75") flange. It is equipped with a water cooling block and a special multi-position rotary motion shutter which allows to shut off 1, 2, 3 or all 4 cells. The shutter can be regulated either manually or remote by a Multi-position Shutter Control Unit MSCU.
For QCS 100 another shutter option is the use of four individual shutters mounted on the same flange. Each one of the four shutters can be opened/closed independently. Each one can be regulated manually or remote by a Rotary Pneumatic Shutter Module RPM.
The use of Quad Cluster Source increases the capacity of your UHV System by using only a single port for up to four individual sources.
Possible applications are organic material deposition or other material evaporation up to about 1100°C.
|Mounting flange||DN40CF (O.D. 2.75") or DN63CF (O.D. 4.5")|
|Dimensions in vacuum QCS 40
||Length: standard 220 mm (180-400 mm on request); Diameter: 36 mm
|QCS 63||Length: standard 220 mm (180-400 mm on request); Diameter: 45 mm|
|Distance source-sample||Typically 100 to 160 mm|
|Temperature sensor||Type K (Chromel/Alumel)
|Typical power consumption QCS 40||500°C @ 8 W / 4 A, 1100°C @ 50 W / 7 A
|QCS 63||500°C @ 8 W / 4 A, 1100°C @ 50 W / 7 A|
|Crucible material||PBN, Quartz, Al2O3, etc.|
|Crucible nominal charge QCS 40||1-12: 0.2 cm3
|QCS 63||1-14: 0.6 cm3|
|Cooling||Water cooled block, 30 l/h cooling water flow, low temperature crosstalk|
|Shutters||integrated multi-position rotary shutter (S)|
Crucible sizes from 0.2 cm3 and 0.6 cm3 are frequently used in Quad Cluster Sources. Other dimensions and different shapes (cylindrical, conical) are available on request. The standard crucible material is PBN. Other crucible materials are available on request.
|Schematic drawing of a Quad Cluster Source QCS 40
(drawing shows QCS 40-4x1-12-S with multi-position shutter)
|Schematic drawing of a Quad Cluster Source QCS 63
(drawing shows QCS 63-4x1-14-S with with multi-position shutter)
|[cm³]||[mm]||Type||Type||[mm] / [mm]||[W] / [A]||Product code||Product code|
|QCS||40 -||4x1 -||12 -||S -||SF¹ -||K -||Q -||LxxxD36||15 / 7||4x PS 15-10-C||Quartz 1-12|
|QCS||63 -||4x1 -||14 -||S -||SF¹ -||K -||Q -||LxxxD45||15 / 7||4x PS 15-10-C||Quartz 1-14|
|*||rotary shutter possible on same flange||1||alternatively CL|
|**||P=PBN standard, Q=Quartz; other materials on request||2||alternatively HL|
|***||specify UHV length L with order|
Please contact us if you need any other source configuration.
Example for Product code:
e.g. QCS 40-4x1-10-S-SF-K-Q-L220D36
is a Quad Cluster Source on a DN40CF flange, with four 1 cm3 quartz crucibles (lip diameter 12 mm), integrated rotary shutter, standard filament heaters, type K thermocouple, in-vacuum length 220 mm and diameter 36 mm.