MBE Components, Loadlock Heater WH 40

WH 40

Loadlock Heater

 

WH 40
WH 40 Loadlock Heater

  • Tantalum or Tungsten heater

  • Wafer or chamber temperatures according to setup (~400°C)

  • Clean operation and high reliability

  • Suitable for substrate sizes from 1" to 6"

  • Customized solutions available

 

The main purpose of the Loadlock Heater WH 40 is the controlled heating of the chamber walls and also of substrates within a vacuum chamber under high to ultra-high vacuum conditions.
The heater concept is based on the reliable and well-known Standard Effusion Cells WEZ.

 

Application

WH 40 Loadlock Heaters are usually employed in research type UHV systems for heating substrates and / or chamber walls.

 

Technical data
Filament type Ta or W wire heating filament
Thermocouple W5%Re/W26%Re (type C) or Chromel/Alumel (type K)
Operating temperature 700°C - 800°C
Bakeout temperature 250°C
Mounting flange DN40CF (O.D. 2.75")
Dimensions
 L,D customer specific, OL=107 mm, AR= 54 mm

 

Dimensions

Schematic drawing WH 40
Schematic drawing of the Loadlock Heater WH 40

 

Specific data

For general information on CF mounting flanges see Flange and Gasket dimensions.

 If you are interested in a WH 40 Loadlock Heater, please contact us for more information.