MBE Components, Standard Effusion Cell WEZ

WH40

Loadlock Heater

 

WH40
WH40 Loadlock heater
  • Tantalum or Tungsten heater

  • Wafer or chamber temperatures according to setup (~400°C)

  • Clean operation and high reliability

  • Suitable for substrate sizes from 1" to 6"

  • Customized solutions possible

 

The main purpose of the Loadlock Heater WH40 is the controlled heating of the chamber walls and also of substrates within a vacuum chamber under high to ultra-high vacuum conditions.
The heater concept is based on the reliable and well-known Standard Effusion Cells WEZ.

 

Application

WH40 Loadlock heaters are usually employed in research type UHV systems for heating substrates and / or chamber walls.

 

Technical data

Filament type Ta or W wire heating filament
Thermocouple W5%Re/W26%Re (type C) or Chromel/Alumel (type K)
Operating temperature 700°C - 800°C
Bakeout temperature 250°C
Mounting flange DN40CF

 

 

Dimensions

Schematic drawing WH40
Schematic drawing of the Loadlock Heater WH40

 

Specific data

For general information on CF mounting flanges see Flange and Gasket dimensions.

 f you are interested in a WH wafer heater please contact us for more information.