MBE Systems
MBE SYSTEMS
Octoplus 300OCTOPLUS 300
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Octoplus-O 400OCTOPLUS-O 400
Octoplus 500OCTOPLUS 500
Octoplus 500 EBVOCTOPLUS 500 EBV
Customized UHV SystemsCustomized UHV Systems

Thin Film SystemsThin Film Systems

Organic Deposition SystemOrganic Deposition System
Rapid Thermal Annealing System Rapid Thermal Annealing System
 
 
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customized evaporators Oxygen Resistant Effusion cell OREZ VCS SH GaP decomposition substrate manipulation Soft-acting Linear Shutter Module LSM DECO MCU MBE Elektronenstrahlverdampfer HV in-situ characterization tool Organikverdampfer shutter module valved sources Linear Sources LEZ CIGS source OLED linear source In-situ Etching System ISES SiC heater CIGS deposition system Standard Effusion Cell WEZ SCU beam shaping Standard Electron Beam Evaporator EBV Thin Film Sources WEZ viewport shutter Phosphorus Doping Source DECO-D