![]() Omicron MULTIPROBE MBE for 2'' wafer, deposition chamber with 14'' cluster flange, up to seven ports for effusion cells |
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The combination of OMICRON's wide range of multi-technique surface analysis systems for scanning probe microscopy and electron spectroscopy with the sophisticated MBE technology from Dr. Eberl MBE-Komponenten GmbH offers a new level of MBE / Analysis performance on wafer samples up to 4'' in diameter. |
![]() Omicron MULTIPROBE MBE for Si andSi/Ge research; 4'' wafer handling system, flexible combination of two electron beam evaporators and up to eight effusion cells or doping sources |