Products for Applications in Metal Deposition

Applications in

Metal Deposition

We engineer and manifacture metal deposition systems as well as thermal evaporation sources up to 2000°C, single and multi-pocket electron beam evaporators for metal layer deposition. Physical vapor deposition (PVD) systems are equipped with sputter sources upon request.
A mini Rapid Thermal Annealing system is available for contact formation, re-crystallization processes and intermixing processes.

Examples:
  • Magnetic material devices (memories, tunnel junctions)
  • Al Contact deposition for OLEDs
  • Au, Ag deposition for device contacts
  • Au-assisted nano-wire fabrication
Aluminum
Aluminum


UHV Deposition and Annealing Systems

Octoplus 400OCTOPLUS 400 Octoplus 500 EBVOCTOPLUS 500 EBV Rapid Thermal Annealing SystemRapid Thermal Annealing System


Components for Metal Deposition

Effusion CellsEffusion Cells High Temperature Effusion Cell HTEZHigh Temperature Effusion Cell
HTEZ
E-Beam EvaporatorsE-Beam Evaporators
Point SourcesIndustrial Point Sources
PEZ-G
Linear EvaporatorsLinear Sources
LEZ


Simulation of deposition process

MC-SimulationMC-Simulation
Flat Panel
Roll-to-Roll