Products for applications in metal deposition

Application

Metal Deposition

 

We engineer and manifacture metal deposition systems as well as thermal evaporation sources up to 2000°C, single and multi-pocket electron beam evaporators for metal layer deposition. Physical vapor deposition (PVD) systems are equipped with sputter sources upon request.
A mini Rapid Thermal Annealing system is available for contact formation, re-crystallization processes and intermixing processes.

Examples:
  • Magnetic material devices (memories, tunnel junctions)
  • Al Contact deposition for OLEDs
  • Au, Ag deposition for device contacts
  • Au-assisted nano-wire fabrication
Aluminum
Aluminum

 

UHV Deposition and Annealing Systems

Octoplus 400OCTOPLUS 400 Rapid Thermal Annealing SystemRapid Thermal Annealing System

 

Components for Metal Deposition

Effusion CellsEffusion Cells High Temperature Effusion Cell HTEZHigh Temperature Effusion Cell
HTEZ
E-Beam EvaporatorsE-Beam Evaporators
Point SourcesIndustrial Point Sources
PEZ-G
Linear EvaporatorsLinear Sources
LEZ

 

Simulation of deposition process

MC-SimulationMC-Simulation
Flat Panel
Roll-to-Roll