We develop oxide MBE systems and components for the deposition of oxide films in UHV systems. The products applied for the deposition of high TC superconductors yttrium barium copper oxide (YBCO) layers, metal oxides (like SrTiO3), high k-dielectics as well as ZnO and other oxide materials. The MBE system and the components are designed to operate in a reactive oxygen environment. Substrate manipulators for these applications are equipped with oxygen resistant Pt or SiC heaters.
Electron beam evaporation as well as special thermal evaporation sources are used for vacuum deposition of oxide layers. Sputter sources can be integrated upon request.
|Oxigen Resistant Substrate Manipulator SH-O
|Oxygen Resistant Effusion Cells
|High Temperature Effusion Cells
|Oxygen Atom Beam Source
|Free Microplasma Source FMP