Large capacity up to 6000cm³
High flow rate
Propriatary encapsulation of heater and inner shielding
Excellent homogeneity due to beam shaping nozzle design
Evaporation zones up to 220cm width
Our linear evaporation sources LEZ are applied in industrial thin film deposition processes.
The unique design of the source provides excellent performance in terms of stability and homogeneity.
In every detail the source has been constructed for a long life time and easy maintenance. Our proprietary and patented encapsulation of the inner source and careful selection of materials and its combination ensures long lifetime.
Main applications of the LEZ are:
Applications of the LEZ for CIGS deposition are currently exclusive for one of our customers
Please contact us for more detailed informations.