|PVSS 320-9600 for industrial applications|
The PVSS is a valved selenium / sulfur source, which is employed in high efficiency CIGS and CIS solar cell production.
Se or S vapor pressure is generated in a heated large capacity glass crucible. The heaters are positioned in the isolation vacuum surrounding the crucible, valve and tubes. The outlet of the valve opens into a customized injector. The isolation vacuum of the source is separated from the process chamber. The outer walls of the reservoir are water cooled.
The valve arrangement is robust and eliminates the risk of locking, which is a frequently observed problem with needle valves.
We offer customized heated gas distribution systems on request.
For more details on the smaller R&D type valved sources see VSCS.
MBE-Komponenten provides support in the design of research or production systems in order to achieve a customized source geometry, optimized for a specified layer uniformity and highly efficient deposition material usage.
|Operation temperature||max. 350°C|
|Valve||Pneumatic, normally closed|
|crucible volume||9600 cm³|
|Glass liner option||1000 cm³/usable half-sphere|
|Crucible heater||1550 W|
|Top heater||1320 W|
|Valve and tube heater||820 W|
|Power supply||400 V, 16 A; 50 Hz; 3 Phases|
|Compressed air||8 - 10 bar|
|Isolation vacuum||< 3 mbar|
|Cooling water pressure
|Water flow rate||2,2 l/min|