Flange size 4.5’’ (DN63CF)
Cell with integrated water cooling on 4.5’’/6’’
Indirect evaporation for Cu with insert
Beam shaping, increased material efficiency
BN liner on request
Large opening / reduced temperature
Se resistant shielding
Se resistant heater
Protected power feedthrough
Production Effusion Cell PEZ is specially designed to meet the particular requirements for II-VI semiconductors, CIGS and for Kesteride solar cell material deposition. The operating temperature range is 200-1400°C. It allows evaporation or sublimation of a large number of elements and compounds, including standard materials such as Se, Ga, Cu, In, NaF, Sn or Zn.
The PEZ offers precise flux reproducibility and excellent thickness uniformity.
The PEZ design offers wide flexibility to adapt to the particular requirements of UHV deposition applications with high throughput such as fabrication of II-VI semiconductor devices or thin film solar cell development.
Cylindrical 160 cm³ crucible for the PEZ 63-160-60 with the beam shaping insert in the orifice
Simple removal of crucible and beam shaping insert from top allows easy crucible replacement and source refill. Our proprietary cell encapsulation provides increased lifetime for the heater and the shielding in the aggressive Se and/or S environment.
The PEZ is especially suited for II-VI semiconductors, CIGS and for Kesteride solar cell material growth.
It allows evaporation of a large number of elements and compounds, including materials such as Se, Ga, Cu, In, NaF, Sn or Zn. The PEZ provides a robust cell design and the consequent optimization of many details leading to a improvement of stability and reproducibility, as well as excellent reliability and easy servicing.
Capacity for the PEZ 63-160-60: 160 ccm crucible for a 30° tilted cell geometry:
|copper||8,954 g/cm3||98 g||877 g|
|indium||7,31 g/cm3||95 g||819 g|
|gallium||5,904 g/cm3||77 g||661 g|
The PEZ 63-160 effusion cell is suitable for fast ramping procedures to comparably high deposition rates. With a precise dynamic ramping, the rate profiles of inline deposition systems can be reproduced. Process development and transfer from MBE-like co-evaporation systems to inline production systems become much easier.
A more detailed description you will find in the attached paper (28th EU-PVSEC, 3BV.5.17).
|Filament type||wire heating filament: standard (SF), hot lip (HL), cold lip (CL), dual (DF)|
|Thermocouple||W5%Re/W26%Re (type C) (type K on request)|
|Operating temperature||200-1400°C (recommended 700-1300°C)|
|Cooling||integrated water cooling shroud|
|Crucibles||25 cm³, 160 cm³, 420 cm³; crucible material: PBN|
|Options||Rotary shutter (S)|
Standard crucible material for the PEZ is PBN. Other crucible materials are available upon request.
For more detailed information about the crucible dimensions see page Crucibles.
The second number of the product code is the nominal crucible capacity [in cm³], the third number indicates the lip diameter [in mm] of the crucible. Please specify crucible material, if not PBN.
|Schematic drawing of the Production Effusion Cell PEZ
For general information on CF mounting flanges see Flange and Gasket dimensions.
|[cm³]||[mm]||Type||Type||[mm] / [mm]||[W] / [A]||Product code||Product code|
|PEZ||63 -||25 -||33 -||K -||SF* -||C -||P -||LxxxD58||650 / 13||PS 40-19||PBN 25-33|
|PEZ||63 -||160 -||60 -||K -||SF* -||C -||P -||LxxxD62||1000 / 14||PS 80-19||PBN 160-60|
|*||alternatively CL, HL or DF|
|**||PBN standard, other materials on request|
|***||specify UHV length L with order|
Larger sizes for industry applications are available, too. Please have a look at Industrial Sources.
e.g. PEZ 63-160-K-DF-C-P-L300D62
is an PEZ on DN63 CF flange, with 160ccm cruible, with water cooling shroud, dual filament Type C thermocouple, PBN crucible, in-vacuum length of 300mm and diameter of 62mm.