Provides cracked or uncracked selenium flux
Flux modulation and on/off control by motorized valve
Source capacities from 300 up to 6000 cm³
Water-cooled assembly
Excellent flux uniformity due to beam shaping nozzle
Avoids loss of selenium during system bakeout
The VSCS is a valved Selenium cracker source, employed in high efficiency CIGS solar cell growth and other II-VI semiconductor material deposition processes. |
![]() Large capacity reservoir of the PVSS-9600 for industrial applications |
The VSCS Valved Selenium Cracking Source has been designed for the controlled evaporation of selenium. It can used for II-VI semiconductor thin film research and solar cell manufacturing. Other possible applications are, for example, post-growth selenization processes with or without carrier gas.
MBE-Komponenten provides support in the design of customer-specific research or production systems in order to achieve a customized source geometry, optimized for specified layer uniformity and most efficient deposition material consumption.
Co-deposition processes can be simulated on request. The simulations are based on geometric and Monte Carlo method calculations. Typical results include the lateral layer thickness distribution and material composition for multiple material co-deposition processes on semiconductor wafers as well as on large area substrates.
Technical data |
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Type | VSCS-300 | VSCS-500 |
Crucible capacity | 300 cm³ | 500 cm³ |
Length of injector tube | 250 to 400 mm | 250 to 400 mm |
In-Vacuum diameter (w/o cooling shroud) |
see drawing below | contact us |
Operating temperatures - crucible zone - cracker (no cracking) - cracker (cracking) |
250 to 370°C 350-500°C 900-1100°C |
250 to 370°C 350-500°C 900-1100°C |
Outgassing temperature (crucible / cracker) Max. bakeout temperature |
400° / 1200°C 250°C |
400° / 1200°C 250°C |
Water cooling | main body injector tube (option) |
main body injector tube (option) |
Valve opening time | 1-2 sec | 1-2 sec |
Heater circuits | - crucible + valve - cracker |
- crucible + valve - cracker |
Thermocouples | W5%Re/W26%Re (typeC) 2 thermocouples (crucible-valve / cracker) |
W5%Re/W26%Re (typeC) 2 thermocouples (crucible-valve / cracker) |
Valve control | manual or motor drive MVCU | manual or motor drive MVCU |
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Schematic drawing of the Valved Selenium Cracker Source VSCS (drawing shows VSCS-300 with VDAP adapter) |