- Compatible with most High Vacuum systems
- For Metal Deposition / Thin Film
- Equipped with O-Ring seal
- Various crucible sizes and materials; crucible capacities 1.5, 10, and 35 cm³
- Self-supporting tungsten wire heater
- Clean operation in HV
- High reliability and long lifetime
- Cell option with integrated cooling shroud and shutter
Introduction
The High Temperature Cell HTEZ-K is designed for clean HV operation. This is accomplished by a self-supporting tungsten filament. HTEZ-K cells are highly efficient, enable a very reproducible temperature measurement and allow precise adjustment as the thermocouple measuring point is close to the crucible. Well-designed tungsten filaments have proved to be very stable, thus safeguarding a long lifetime even when working on the upper limit of the cells. The HTEZ-K design allows mounting ceramic crucibles (e.g. PBN, BeO, etc.) directly into the cell. Separate cooling shrouds are recommended for larger HTEZ-K cells to avoid overheating of stainless-steel parts within the HV recipient during operation. Some of the larger cells can be delivered with an integral shutter on the cell flange.
Application
The HTEZ-K is designed for evaporation or sublimation of low vapor pressure elements and compounds at temperatures up to 1900°C, e.g. for metals like Fe, Cr, Ni, Co, Au etc. Typical applications are surface science analysis or thin film deposition of metal layers.
The maximum operating temperature of the HTEZ-K may be limited by the crucible choice, e.g. to 1600°C with PBN. Furthermore, possible reactions of evaporants with the crucible material should be considered, which may also reduce the maximum advisable temperature.
Crucibles
Standard crucible sizes are 1.5, 10 and 35 cm³ (other shapes and dimensions available upon request).
The second number of the product code is the nominal crucible capacity [in cm³]; the third number indicates the lip diameter of the crucible. Please specify crucible material upon ordering, or inquire for our recommendation.
