- Compatible with most High Vacuum systems
- For Metal Deposition / Thin Film
- Equipped with O-Ring seal
- Various crucible sizes and materials; crucible capacities 1.5, 10, and 35 cm³
- Self-supporting tungsten wire heater
- Clean operation in HV
- High reliability and long lifetime
- Cell option with integrated cooling shroud and shutter
Introduction
The High Temperature Cell HTEZ-K is designed for clean HV operation. This is accomplished by a self-supporting tungsten filament. HTEZ-K cells are highly efficient, enable a very reproducible temperature measurement and allow precise adjustment as the thermocouple measuring point is close to the crucible. Well-designed tungsten filaments have proved to be very stable, thus safeguarding a long lifetime even when working on the upper limit of the cells. The HTEZ-K design allows mounting ceramic crucibles (e.g. PBN, BeO, etc.) directly into the cell. Separate cooling shrouds are recommended for larger HTEZ-K cells to avoid overheating of stainless-steel parts within the HV recipient during operation. Some of the larger cells can be delivered with an integral shutter on the cell flange.
Application
The HTEZ-K is designed for evaporation or sublimation of low vapor pressure elements and compounds at temperatures up to 1900°C, e.g. for metals like Fe, Cr, Ni, Co, Au etc. Typical applications are surface science analysis or thin film deposition of metal layers.
The maximum operating temperature of the HTEZ-K may be limited by the crucible choice, e.g. to 1500°C with PBN. Furthermore, possible reactions of evaporants with the crucible material should be considered, which may also reduce the maximum advisable temperature.
