MBE Components, Crucibles

Crucibles

Standard PBN crucibles of different shapes and sizes

All kinds of crucible shapes
Wide range of crucible sizes
Standard PBN crucibles
Refractory and noble metal crucibles (W, Ta, Ir, etc.)
Pyrolytic graphite (PG) crucibles
Al₂O₃, BeO and MgO crucibles

Pyrolytic boron nitride (PBN) crucibles have become the accepted crucible material for use in MBE growth of semiconductor materials because of the material's high purity, chemical inertness, thermal stability, low outgassing, non-wetting characteristics and long lifetime.

PBN can be used for temperatures up to 1500°C. The maximum temperature decreases with rising chamber pressure.
For higher temperatures or for special applications crucibles made of other materials like tungsten (W), tantalum (Ta), pyrolytic graphite (PG), silicon dioxide (quartz), aluminum oxide (Al₂O₃), beryllium oxide (BeO), or magnesium oxide (MgO).
Other crucible materials are available on request.

Specifications

The crucibles described in the following are standard crucibles used in our MBE sources and are available as spare parts.For each crucible the respective part number, product code and suitable source type is indicated.

The crucible product code specifies material, nominal capacity (in cm³) and lip diameter (in mm). The nominal capacity is consistent with the capacity of the corresponding sources. Due to special material properties (e.g. of BeO or Al₂O₃), the actual filling capacity may be smaller than the nominal value.

Other dimensions, shapes and materials are available on request. Please contact us if you require more information. We help you select the best crucible for your particular application.

Important:
All dimensions are given in millimeters and rounded. Drawings are not to scale and shall not be used for manufacture.
No responsibility is taken for the correctness of the values.

The crucible product code is composed as follows:

material	shape*	capacity	other*	–	lip Ø
PBN	C	2		–	22
PBN		10	D	–	22

* omitted when not required

Abbreviations:

D		double wall crucibles
C		conical shaped crucibles

List of materials:

PBN		pyrolytic boron nitride
PG		pyrolytic graphite
Al₂O₃		aluminium oxide
Quartz		silicon dioxide
BeO		beryllium oxide
MgO		magnesium oxide
W		tungsten
Ta		tantalum


Part no. / Code:	415-00-084 / PBN 1-12 480-00-011 / Quartz 1-12 430-00-083 / Al₂O₃ 1-12 420-00-046 / PG 1-12
Capacity / Source type:	1 cm³ / QCS, OEZ Clusters


Part no. / Code:	415-00-065 / PBN 1-14 480-00-014 / Quartz 1-14 430-00-080 / Al₂O₃ 1-14 420-00-038 / PG 1-14
Capacity / Source type:	1 cm³ / DCS, QCS, OEZ Clusters


Part no. / Code:	415-00-148 / PBN 1-20 420-00-076 / PG 1-20 430-00-119 / Al₂O₃ 1-20 440-00-043 / Ta 1-20
Capacity / Source type:	1.5 cm³ / HTEZ


Part no. / Code:	435-00-026 / BeO 1-20
Capacity / Source type:	1.5 cm³ / HTEZ


Part no. / Code:	415-00-030 / PBN 2-16 480-00-008 / Quartz 2-16 430-00-044 / Al₂O₃ 2-16
Capacity / Source type:	2 cm³ / WEZ, NTEZ, DDS


Part no. / Code:	415-00-040 / PBN C2-22
Capacity / Source type:	2 cm³ / WEZ, NTEZ


Part no. / Code:	480-00-006 / Quartz 2-25
Capacity / Source type:	2 cm³ / OME


Part no. / Code:	415-00-009 / PBN 5-16
Capacity / Source type:	5 cm³ / WEZ, NTEZ, DDS


Part no. / Code:	415-00-020 / PBN C5-27
Capacity / Source type:	5 cm³ / WEZ, NTEZ, DDS


Part no. / Code:	415-00-013 / PBN C5-29
Capacity / Source type:	5 cm³ / WEZ, NTEZ


Part no. / Code:	420-00-003 / PG 5-30 455-00-030 / W 5-30 440-00-060 / Ta 5-30
Capacity / Source type:	5 cm³ / HTS


Part no. / Code:	435-00-005 / BeO 5-30 430-00-036 / Al₂O₃ 5-30
Capacity / Source type:	5 cm³ / HTS


Part no. / Code:	415-00-182/ PBN 6-22 415-00-206/ PBN 6D-22 430-00-154/ Al₂O₃ 6-22
Capacity / Source type:	6 cm³ / WEZ, NTEZ


Part no. / Code:	415-00-140 / PBN C8-27
Capacity / Source type:	8 cm³ / WEZ, NTEZ, DDS


Part no. / Code:	440-00-033 / Ta 10-18 455-00-021 / W 10-18 456-00-001 / Ir 10-18
Capacity / Source type:	10 cm³ / HTEZ


Part no. / Code:	415-00-006 / PBN 10-22 415-00-029 / PBN 10D-22 420-00-032 / PG 10-22
Capacity / Source type:	10 cm³ / WEZ, NTEZ, DDS


Part no. / Code:	480-00-001 / Quartz 10-22 435-00-007 / BeO 10-22 430-00-042 / Al₂O₃ 10-22
Capacity / Source type:	10 cm³ / WEZ, NTEZ, DDS


Part no. / Code:	415-00-024 / PBN 10-32 420-00-032 / PG 10-32 430-00-002 / Al₂O₃ 10-32
Capacity / Source type:	10 cm³ / HTEZ, HTEZ-W


Part no. / Code:	435-00-002 / BeO 10-32
Capacity / Source type:	10 cm³ / HTEZ, HTEZ-W


Part no. / Code:	440-00-024 / Ta 10-32 455-00-006 / W 10-32
Capacity / Source type:	10 cm³ / HTEZ, HTEZ-W


Part no. / Code:	480-00-003 / Quartz 10-35
Capacity / Source type:	10 cm³ / OME


Part no. / Code:	415-00-057 / PBN C12-36 430-00-065 / Al₂O₃ C12-36
Capacity / Source type:	12 cm³ / WEZ, NTEZ


Part no. / Code:	415-00-112 / PBN C12-37
Capacity / Source type:	12 cm³ / WEZ, NTEZ


Part no. / Code:	415-00-014 / PBN C16-36 415-00-023 / PBN C16D-36 430-00-085 / Al₂O₃ C16-36
Capacity / Source type:	16 cm³ / WEZ, NTEZ


Part no. / Code:	415-00-041 / PBN 25-33 435-00-014 / BeO 25-33 430-00-057 / Al₂O₃ 25-33 440-00-046/ Ta 25-33 455-00-028 / W 25-33
Capacity / Source type:	25 cm³ / WEZ , NTEZ


Part no. / Code:	415-00-035 / PBN C25-51
Capacity / Source type:	25 cm³ / PEZ


Part no. / Code:	415-00-015 / PBN 25-50 420-00-014 / PG 25-50
Capacity / Source type:	25 cm³ / HTS


Part no. / Code:	435-00-006 / BeO 25-50
Capacity / Source type:	25 cm³ / HTS


Part no. / Code:	415-00-007 / PBN 35-34 420-00-016 / PG 35-34 480-00-002 / Quartz 35-34
Capacity / Source type:	35 cm³ / WEZ, NTEZ


Part no. / Code:	415-00-034 / PBN 35-37 420-00-044 / PG 35-37 430-00-108 / Al₂O₃ 35-37 435-00-009 / BeO 35-37 480-00-005 / Quartz 35-37 455-00-038 / W 35-37
Capacity / Source type:	35 cm³ / WEZ, NTEZ, OME TCC


Part no. / Code:	430-00-035 / Al₂O₃ C35-54
Capacity / Source type:	35 cm³ / HTEZ


Part no. / Code:	435-00-003 / BeO C35-54
Capacity / Source type:	35 cm³ / HTEZ


Part no. / Code:	415-00-042 / PBN 40-36 415-00-077 / PBN 40D-36
Capacity / Source type:	40 cm³ / WEZ , NTEZ


Part no. / Code:	415-00-036 / PBN C40-51
Capacity / Source type:	40 cm³ / PEZ


Part no. / Code:	415-00-032 / PBN 60-37 480-00-031 / Quartz 60-37
Capacity / Source type:	60 cm³ / WEZ , NTEZ


Part no. / Code:	415-00-005 / PBN C60-54 415-00-055 / PBN C60D-54 435-00-021 / BeO C60-54
Capacity / Source type:	60 cm³ / PEZ, WEZ, NTEZ


Part no. / Code:	415-00-043 / PBN C70-60
Capacity / Source type:	70 cm³ / PEZ


Part no. / Code:	415-00-046 / PBN C75-77
Capacity / Source type:	75 cm³ / PEZ


Part no. / Code:	415-00-021 / PBN C80-54 415-00-086 / PBN C80-D54
Capacity / Source type:	80 cm³ / PEZ, WEZ, NTEZ


Part no. / Code:	418-00-170 / PBN C82-71
Capacity / Source type:	82 cm³ / HTEZ


Part no. / Code:	415-00-018 / PBN 85-41 435-00-017 / BeO 85-41 430-00-060 / Al₂O₃ 85-41
Capacity / Source type:	85 cm³ / PEZ, WEZ, NTEZ


Part no. / Code:	415-00-011 / PBN 125-54
Capacity / Source type:	125 cm³ / WEZ, NTEZ


Part no. / Code:	415-00-075 / PBN 130-54
Capacity / Source type:	130 cm³ / PEZ, TCC, VTCC


Part no. / Code:	415-00-044 / PBN 150-60
Capacity / Source type:	150 cm³ / PEZ


Part no. / Code:	415-00-045 / PBN 155-60
Capacity / Source type:	155 cm³ / PEZ, WEZ, NTEZ


Part no. / Code:	415-00-100 / PBN 160-60
Capacity / Source type:	160 cm³ / PEZ


Part no. / Code:	415-00-012 / PBN 200-58
Capacity / Source type:	200 cm³ / WEZ, NTEZ


Part no. / Code:	415-00-038 / PBN C200-84
Capacity / Source type:	200 cm³ / PEZ


Part no. / Code:	415-00-008 / PBN 200-102 420-00-017 / PG 200-102
Capacity / Source type:	200 cm³ / HTS


Part no. / Code:	425-00-001 / MgO C230-98 430-00-004 / Al₂O₃ C230-98
Capacity / Source type:	230 cm³ / OREZ


Part no. / Code:	415-00-047 / PBN 420-84
Capacity / Source type:	420 cm³ / PEZ