Phosphorus

PhosphorusPhosphorus

Temperatur
Pressure P-GaP-Ga Vapor Pressure Application
VGCS
DECO

  *    vapor pressure is approximated for the shown pressure range according to P [mbar] = 10( A - B / T[ k ] )

Verweis 1 typical growth rate ~ 0,01...1nm/sec depends on geometrical setup
Verweis 2 doping levels up to 1020cm-3, depends on geometrical setup

The Phosphorus evaporation is based on GaP decomposition.

 
 
 

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