![Phosphorus Phosphorus](/applications/el-table/ptab.gif)
![Phosphorus](/applications/ueberschriften/p.gif)
* vapor pressure is approximated for the shown pressure range according to P [mbar] = 10( A - B / T[ k ] )
typical growth rate ~ 0,01...1nm/sec depends on geometrical setup
doping levels up to 1020cm-3, depends on geometrical setup
The Phosphorus evaporation is based on GaP decomposition.