- Source clusters increase the capacity of MBE systems
- 4 cells on one DN40CF (2.75") flange or DN63CF (4.5") flange
- Very compact cell design
- Various crucible types and sizes available
- Integrated water cooling
- Multi-position shutter for QCS 40 and QCS 63 Datasheet
Introduction
Source clusters can add more sources to your MBE system, either as
thin-film deposition source in nanosciences or as doping source. Because
of the large variety of different UHV systems each cluster is
individually designed. We offer a large variety of source clusters based
on our standard evaporation cells with four different cells mounted on a
single flange.
By default the “quad” cluster sources are designed as
four-cell-clusters. However we are to supply customized solutions with
two cells, e.g., Dual Cluster Sources
DCS on one mounting flange tailored to the
customers’ need.
The picture above shows a 4-fold source cluster with 4 x 0.2 cm³ PBN
crucibles mounted on a DN40 CF (O.D. 2.75") flange. It is equipped with
a water cooling block and a special multi-position rotary motion shutter
which allows to shut off 1, 2, 3 or all 4 cells. The shutter can be
regulated either manually or remote by a Multi-position Shutter Control
Unit MSCU .
For QCS 100 another shutter option is the use of four individual
shutters mounted on the same flange. Each one of the four shutters can
be opened/closed independently. Each one can be regulated manually or
remote by a Rotary Pneumatic Shutter Module
RPM .
Application
The use of Quad Cluster Source increases the capacity of your UHV System
by using only a single port for up to four individual sources.
Possible applications are organic material deposition or other material
evaporation up to about 1100°C.
Technical Characteristics
| Mounting Flange | DN40CF (O.D. 2.75") or DN63CF (O.D. 4.5") |
| In‑vacuum dimensions | QCS 40: Length : standard 220 mm (180-400 mm on request) ; Diameter : 36 mm, QCS 63 Length : standard 220 mm (180-400 mm on request); Diameter : 45 mm |
| Thermocouple, Temperature sensor (other types on request) | Type K |
| Operating temperature | 25-1000°C |
| Outgassing temperature | 1100°C |
| Bakeout temperature | 250°C |
| Cooling / water cooling | Water cooled block Low temperature crosstalk: one cell 1300°C / second cell 150°C possible |
| Cooling water flow | 30 l/h |
| Crucibles | PBN, Quartz, Al2O3, etc. Nominal charge QCS 40: 1-12: 0.2 cm³, QCS 63: 1-14: 0.6 cm³ |
| Options | integrated multi-position rotary shutter (S) |
| Power | QCS 40: 500°C @ 8 W / 4 A, 1100°C @ 50 W / 7 A, QCS 63: 500°C @ 8 W / 4 A, 1100°C @ 50 W / 7 A |
Technical Data
For general information on CF mounting flanges see Flange, Gasket and Tube Dimensions .| Product | Flange [CF] | Nominal capacity [cm³] | Lip diameter [mm] | Shutter | Filament type | Thermocouple type | UHV dimensions [mm] specify L with order | |
|---|---|---|---|---|---|---|---|---|
| QCS | 40 | 4x1 | 12 | S | SF, CL | K | LxxxD36 | |
| QCS | 63 | 4x1 | 14 | S | SF, CL | K | LxxxD45 | |
Example: QCS 40-4x1-10-S-SF-K-Q-L220D36 is a Quad Cluster Source on a DN40CF flange, with four 1 cm 3 quartz crucibles (lip diameter 12 mm), integrated rotary shutter, standard filament heaters, type K thermocouple, in-vacuum length 220 mm and diameter 36 mm.
