The RPM is a drive unit for rotary shutter motion. Its torque reaches 0.85 Nm at 6 bar air supply.
We provide a variety of cell shutters designed for different evaporation sources. The shutter can be operated manually or by a soft-acting shutter module.
The SCU is the power supply and controller for different soft-acting shutter modules. You may choose between manual and remote controlled shutter operation.
Excellent growth of thin silicon layers, short period Si/Ge superlattices and Si/SiGe heterostructures by means of high purity intrinsic or highly doped Si filament.
Thermal sublimation of silicon from highly doped Si filament, two independent silicon filaments
The LSM consists of a soft-acting linear motion mechanism, driven by an electric motor and acting upon a magnetically coupled linear motion feedthrough.
The RSM is a drive unit for rotary shutter motion that provides a ''soft'', nearly sinusoidal angular velocity profile between two angular shutter positions.
SH substrate manipulators are used in standard III-V MBE, GaN MBE, SiC growth and SiGe MBE. Heaters made from tungsten, tantalum, graphite and SiC are available.
The Thermal Cracker Cell TCC is an effusion cell with additional cracker stage inside and integrated water cooling shroud on a space-saving DN40CF flange.
The Thermostar is a Cu crucible inset for reduction of temperature gradients of organic evaporants.
The Valved Alkali Metal Source AKS is designed for evaporation of elemental high vapor pressure alkali metals like Cs and Rb in standard MBE or UHV systems.