- DN63CF ( O.D. 4.5" ) mounting flange compatible with all MBE systems
- Thermal cracking up to 1200°C
- 500 cm3 reservoir
- Excellent thermal isolation between low temperature reservoir and hot cracking zone
- Cracking stage with integrated water cooling which is used to crack chemical volatile P4 molecules and guarantees safer pressure of the source
Introduction
The main purpose of the VPCS is the controlled evaporation of phosphorus from a reservoir inside the source within a vacuum chamber under high to ultra-high vacuum conditions. The source provides a precise phosphorus flux control by the integrated all metal valve in combination with an easy installation and refilling procedure. The integrated cracking module on top of the injector tube allows conversion of naturally sublimated phosphorus into smaller molecules for improved growth conditions.
The VPCS comprises the following building blocks:
- Injector with a cracking stage which allows cracking of P4 molecules and guarantees safer pression of the source
- The red phosphorus reservoir with flange for loading of the red phosphorus with the dedicated air-sided heater assembly
- The white phosphorus reservoir with air-sided heater
- The UHV tight valve unit with embedded heating
- Secondary UHV valve for differential pumping of the source
Application
A source concept like this is mainly used for growth of III-V compound materials (GaP, InP etc.). The source is designed exclusively to be operated with red phosphorous.
