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Keyword: AKS

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Crucibles CRU valved thermal deposition source transfer rod Cs/Rb-Valved Alkali Metal Source AKS OEZ Cluster mask Oxygen Atom Beam Source OBS linear vapor source e-beam evaporator PEZ valved cracker SCU Linearverdampfer DCS thermal evaporation OLED MBE in-situ monitoring VGCS SH sample transfer Organic Material Effusion Cell OEZ OME-100 Dotierzelle Oxygen Resistant Substrate Manipulator SH-O rapid thermal annealing Rotary Pneumatic Module RPM WEZ DECO BFM Se- and S-Valved Sources VSS

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