Glossary
Glossary

UHV chambers are baked out at about 200C for several days to remove weakly bound surface water and hydrocarbon molecules. Both of which have the effect of limiting the ultimate system vacuum pressure.

The UHV chamber including the UHV components is wrapped by bake-out panels, which completely jacket the whole system, in order to reach a homogenous temperature in all UHV areas of the system.

Without adequate system bake-out the base pressure will not reach levels below 10E-9 mbar in UHV systems.

 
 
 
 

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